Electron emitting device and manufacturing method thereof and image pick up device or display device using electron emitting device

An electron emission device and electron emission technology, applied in the manufacture of electrode systems, manufacture of discharge tubes/lamps, image/graphic display tubes, etc.
CN1938808AInactive Publication Date: 2007-03-28PIONEER CORP +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
PIONEER CORP
Publication Date
2007-03-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

An electron emitting device is composed of a plurality of electron emitting elements. The electron emitting element is provided with a lower electrode (11) and an upper electrode (15) and emits an electron from an upper electrode side. In the electron emitting device, a space is formed between the electron emitting elements and the upper electrode extends over the space on a bridge part (15a). The space is formed by providing a through hole or a notched part (15a) on the bridge part, and etching a stacked body under the upper electrode by using the bridge part as a mask. The upper electrodes of the adjacent electron emitting elements are electrically connected by the bridge part without bringing the upper electrodes into contact with the electron emitting element side planes and a substrate. Therefore, a current path can be shortened and a possibility of disconnection can be reduced.
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Description

technical field

[0001] The present invention relates to an electron emitting element as an electron source, and an electronic device such as an imaging device or a display device using the electron emitting element, and particularly relates to a wiring structure of an electronic device in which a plurality of electron emitting elements are arranged in an array. Background technique

[0002] Conventionally, the structures of electron emission elements as surface electron sources have been disclosed, such as metal-insulator-semiconductor (MIS) type and metal-insulator-metal (MIM) type.

[0003] For example, one example of an electron emission element having a MIM structure has a structure in which a lower electrode, an insulator layer, and an upper electrode are sequentially stacked on a substrate. When this element is placed under the counter electrode in a vacuum, and a predetermined voltage is applied between the lower electrode and the upper electrode, some electrons fly f...

Claims

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