Photoelectric cathode and process for preparing vacuum ultraviolet electric device using said cathode

Abstract

This invention discloses a photoelectric cathode composed of three compound layers, in which, the base layer is made of an ultraviolet transmitting base material, the mid layer is a transparent conduction layer film characterizing that the third layer is a photoelectric emission layer composed of a ZnO film or nanometer line arrays. A method for preparing vacuum UV-devices by said photoelectric cathodes includes the following steps: A, preparation of photoelectric cathodes, B, molding films of the ZnO photoelectric cathode and testing the performance, selecting cathodes meeting the requirement to exhaust and package, packaging the devices applying said photoelectric cathode, which fully utilizes the photoemission and field emission effect of ZnO to solve the shortcoming of the current technology.

Description

technical field [0001] The invention relates to a photoelectric vacuum device, in particular to a photocathode and a preparation process of a vacuum ultraviolet photoelectric device using the cathode. Background technique [0002] Due to the limitation of materials and corresponding preparation technology, the traditional ultraviolet photodiode devices show the following deficiencies in the preparation process of photocathode and device: [0003] 1. The preparation of the photocathode and the exhausting and packaging of the device require a high degree of vacuum in the system (10 -5 -10 -8 pa), making this type of production equipment more expensive; 2. In the sealing and sealing process of the preparation, a one-time preparation and sealing process is generally used, and the whole process is completed in the same equipment, which brings two disadvantages: [0004] ①. During the manufacturing process of the photocathode, it is easy to cause pollution to other parts, such a...

AI Technical Summary

Problems solved by technology

[0010] The technical problem to be solved by the present invention is how to provide a photocathode and a preparation process of a vacuum ultraviolet photoelectric device using the photocathode. The photoelectric effect and field emission effect of zinc oxide solve the deficiencies of the existing technology and possess many new characteristics; The pollution caused to other components such as the tube shell, solves the problem that the photocathode preparation procedure and the device sealing process cannot be carried out step by step, reduces the process flow, and improves production efficiency

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