Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer

a technology of etchable adhesion and perpendicular recording, which is applied in the direction of data recording, instruments, and heads with metal sheet cores, can solve the problems of delamination of high moment materials and poor adhesion, and achieve excellent adhesion to dlc, increase the number of processing steps, and high moment

Inactive Publication Date: 2006-05-25
HITACHI GLOBAL STORAGE TECH NETHERLANDS BV
View PDF8 Cites 19 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The use of tantalum as an adhesion / stop layer ensures improved adherence and prevents delamination, enabling the fabrication of perpendicular recording pole tips with precise height and reduced width, thereby increasing areal density and write signal frequency.

Problems solved by technology

Silicon has excellent adhesion to DLC but does not adhere well to high moment material such as NiFe, CoNiFe and CoFe, which frequently results in delamination of the high moment material which forms the pole tip during CMP.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer
  • Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer
  • Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

Magnetic Disk Drive

[0038] Referring now to the drawings wherein like reference numerals designate like or similar parts throughout the several views, FIGS. 1-3 illustrate a magnetic disk drive 30. The drive 30 includes a spindle 32 that supports and rotates a magnetic disk 34. The spindle 32 is rotated by a spindle motor 36 that is controlled by a motor controller 38. A slider 42 has a combined read and write magnetic head 40 and is supported by a suspension 44 and actuator arm 46 that is rotatably positioned by an actuator 47. A plurality of disks, sliders and suspensions may be employed in a large capacity direct access storage device (DASD) as shown in FIG. 3. The suspension 44 and actuator arm 46 are moved by the actuator 47 to position the slider 42 so that the magnetic head 40 is in a transducing relationship with a surface of the magnetic disk 34.

[0039] When the disk 34 is rotated by the spindle motor 36 the slider is supported on a thin (typically, 0.05 μm) cushion of air ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
contrastaaaaaaaaaa
distanceaaaaaaaaaa
processingaaaaaaaaaa
Login to View More

Abstract

The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion / stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion / stop layer with an opening for patterning the adhesion / stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion / stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion / stop layer. The invention also includes the magnetic head made by such a process.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer and, more particularly, to the steps in making the perpendicular recording pole tip wherein such a layer adheres well to bottom and top layers, is commonly etchable with the bottom layer, adheres well to the pole tip during chemical mechanical polishing (CMP) to prevent delamination and indicates a stop point during the CMP for proper pole tip definition. [0003] 2. Description of the Related Art [0004] The heart of a computer is a magnetic disk drive which includes a rotating magnetic disk, a slider that has write and read heads, a suspension arm and an actuator arm. When the disk is not rotating the actuator arm locates the suspension arm so that the slider is parked on a ramp. When the disk rotates and the slider is positioned by the actuator arm above the disk, air is swirl...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(United States)
IPC IPC(8): G11B5/147G11B5/127G11B5/31
CPCG11B5/1278G11B5/3106Y10T29/49052Y10T29/49048Y10T29/49041Y10T29/49046
Inventor LE, QUANGLI, JUI-LUNGLILLE, JEFFREY S.NGUYEN, SON VAN
Owner HITACHI GLOBAL STORAGE TECH NETHERLANDS BV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com