Method (1000) for forming a ferroelectric direct access memory device, FeRAM device (200), wherein the method (1000) comprises: Forming a first layer stack (202A, 202B, 202C and 202D) and a second layer stack (202A, 202B, 202C and 202D) successively over a substrate (50, 101), wherein the first layer stack (202A, 202B, 202C and 202D) and the second layer stack (202A, 202B, 202C and 202D) each have a first
dielectric layer (201) and an
electrically conductive layer (203) formed over the first
dielectric layer (201); Forming a second
dielectric layer (201T) over the second layer stack (202A, 202B, 202C and 202D); Structuring the first layer stack (202A, 202B, 202C and 202D), the second layer stack (202A, 202B, 202C and 202D) and the second
dielectric layer (201T), wherein a step-shaped region (231) is formed during structuring, wherein in the step-shaped region (231) the second layer stack (202A, 202B, 202C and 202D) extends beyond lateral dimensions of the second
dielectric layer (201T) and the first layer stack (202A, 202B, 202C and 202D) extends beyond lateral dimensions of the second layer stack (202A, 202B, 202C and 202D), wherein after structuring the
electrically conductive layers of the first and second layer stacks (202A, 202B, 202C and 202D) form a first word line or a second word line; Formation of a first dielectric material (205) over the second
dielectric layer (201T) and over the layer stacks (202A, 202B, 202C and 202D); Performing a planarization process such that the upper surface of the first dielectric material (205) lies on a plane with the upper surface of the second dielectric layer (201T); After structuring, a trench (206, 232, 234) is formed, which extends through the first layer stack (202A, 202B, 202C and 202D), the second layer stack (202A, 202B, 202C and 202D) and the second dielectric layer (201T);
Coating the side walls and bottom of the trench (206, 232, 234) with a ferroelectric material (213); Formation of a channel material (207) over the ferroelectric material (213); Filling the trench (206, 232, 234) by forming a second dielectric material (205, 208, 209) above the channel material (207); and Forming a source line and a
bit line in the second dielectric material (205, 208, 209), wherein the source line and the
bit line extend through the second dielectric layer (201T), the second layer stack (202A, 202B, 202C and 202D) and the first layer stack (202A, 202B, 202C and 202D).