Method of filling liquid into function liquid droplet ejection head, and ejection apparatus; method of manufacturing LCD device, organic el device, electron emission device, pdp device, electrophoretic display device, color filter, and organic el; and method of forming spacer, metallic wiring, lens, resist, and light diffusion member

Abstract

An ejection apparatus has a carriage which moves relative to a workpiece. A function liquid droplet ejection head is held by the carriage and is provided with an ejection nozzle formed in a nozzle forming surface of a head main body. A liquid supply tank is connected to the ejection head. A cap unit is disposed in a position away from the workpiece and is provided, in a position corresponding to the function liquid droplet ejection head, with a cap which is connected to the suction pump and which is brought into intimate contact with the nozzle forming surface of the function liquid droplet ejection head so that the liquid of the liquid supply tank is filled into a flow passage inside the ejection head by a suction force to be operated upon through the cap. A gate valve is interposed in the liquid supply passage between the ejection head and the liquid supply tank. The gate valve is temporarily closed in the course of filling the liquid into the flow passage inside the ejection head, while maintaining suction by the cap.

Description

CROSS-REFERENCE [0001] This application is a divisional application of application Ser. No. 10 / 384,015, filed Mar. 10, 2003, the entirety of which is incorporated herein by reference.BACKGROUND [0002] 1. Field of the Invention [0003] This invention relates to a method of filling a liquid into a flow passage inside a function liquid droplet ejection head, in which a liquid is filled into the flow passage inside the function liquid droplet ejection head as represented by an ink jet head. It also relates to an ejection apparatus using a function liquid droplet ejection apparatus which is capable of being filled with the liquid in the above-described method; and to a method of manufacturing a liquid crystal display (LCD) device, a method of manufacturing an organic electroluminescence (EL) device, a method of manufacturing an electron emission device, a method of manufacturing a plasma display panel (PDP) device, a method of manufacturing an electrophoretic display device, and a method ...

AI Technical Summary

Benefits of technology

This approach enhances the efficiency of liquid filling by reducing air bubble presence, minimizing liquid consumption, and improving workability and productivity in manufacturing processes like LCD and organic EL device production.

Problems solved by technology

As a result, the air bubbles cannot be successfully removed out of the flow passage inside the function liquid droplet ejection head, thereby causing the poor ejection or failure in ejection of the liquid droplet under the influence of the remaining air bubbles.

As a consequence, it becomes necessary to repeat the suction operations several times, resulting in the amount of liquid to be consumed at the time of filling, thereby causing a higher running cost.

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