Systems and methods for fabricating blanks for microstructure masters by imaging a radiation sensitive layer sandwiched between outer layers, and blanks for microstructure masters fabricated thereby

Abstract

Microstructures are fabricated by imaging a microstructure master blank that includes a radiation sensitive layer sandwiched between a pair of outer layers, on an imaging platform, to define the microstructures in the radiation sensitive layer. At least one of the outer layers is then removed. The microstructures that were defined in the radiation sensitive layer are developed. The radiation sensitive layer sandwiched between the pair of outer layers may be fabricated as webs, to provide microstructure master blanks.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application is a divisional of application Ser. No. 10 / 661,974, filed Sep. 11, 2003, entitled Methods For Fabricating Microstructures By Imaging A Radiation Sensitive Layer Sandwiched Between Outer layers, and is related to application Ser. No. 10 / 661,916, filed Sep. 11, 2003, entitled Systems and Methods for Fabricating Optical Microstructures Using a Cylindrical Platform and a Rastered Radiation Beam to the present inventors, and application Ser. No. 10 / 661,917, filed Sep. 11, 2003, entitled Systems and Methods for Mastering Microstructures Through a Substrate Using Negative Photoresist and Microstructure Masters So Produced to the present inventors, all of which are assigned to the assignee of the present application, the disclosures of all of which are hereby incorporated herein by reference in their entirety as if set forth fully herein.FIELD OF THE INVENTION [0002] This invention relates to microfabricating methods and system...

AI Technical Summary

Benefits of technology

"The present invention provides a method for mass production of microstructures by fabricating a microstructure master blank that includes a radiation sensitive layer sandwiched between a pair of outer layers. The microstructures are then developed by imaging the master blank and creating a second generation stamper from the developed microstructures. The developed microstructures can be used to create large area masters for microstructures. The invention also provides a system for fabricating the blank with a pair of flexible webs and a radiation sensitive layer that can contain a latent image of optical microstructures or be sensitive to radiation at a predetermined frequency. The invention allows for the efficient and cost-effective mass production of microstructures."

Problems solved by technology

Unfortunately, however, severe scaling barriers may be encountered in attempting to fabricate large arrays of optical microstructures.

These scaling barriers may make it difficult to efficiently produce large arrays of optical microstructures with acceptable manufacturing yields.

Several barriers may be encountered in attempting to scale optical microstructures to large arrays.

First, the time to master a large array may be prohibitive.

Unfortunately, it may be difficult to produce a master for a large array of optical microstructures within a reasonable time.

For example, calculations may show that it may take years to create a single master for large screen rear projection television.

These mastering times may be prohibitive for viable products.

It also may be difficult to image certain optical microstructures that may be desired for many applications.

However, it may be difficult to master a large array of hemispherical sections using conventional photolithographic techniques.

Finally, it may be difficult to efficiently replicate masters containing large arrays of optical microstructures to produce stampers, so as to enable high volume production of optical microstructure end products for display, television and / or other applications.

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