Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same

a laser-based material and processing process technology, applied in the laser field, can solve problems such as limit yield, and achieve the effect of eliminating unnecessary test steps in device fabrication
US20070106416A1Inactive Publication Date: 2007-05-10ELECTRO SCI IND INC
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
ELECTRO SCI IND INC
Publication Date
2007-05-10
Estimated Expiration
Not applicable · inactive patent

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Abstract

A method and system for adaptively controlling a laser-based material processing process are provided. The system includes sensing equipment to measure a process variable or condition of at least one of a laser-based material processing system and a workpiece processed by the material processing system and to provide a corresponding measurement signal. The control system also includes a signal processor for processing the measurement signal to obtain a processed signal which initiates, at least semi-automatically, an action associated with at least one of the material processing system and the workpiece. A method and system for at least semi-automatically qualifying a laser-based material processing system which delivers laser energy to locations on or adjacent a plurality of microstructures formed on a workpiece to at least partially process the microstructures are also provided.
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Description

CROSS-REFERENCE TO RELATED PATENTS AND PUBLISHED PATENT APPLICATIONS

[0001] This application claims the benefit of U.S. provisional patent application Ser. No. 60 / 810,964 filed Jun. 5, 2006.

[0002] Except where indicated, the following patents and patent applications are assigned to the assignee of the present invention and are hereby incorporated by reference in their entirety herein: U.S. Pat. No. 6,972,268 (the '268 patent); U.S. Pat. No. 6,949,844 (the '844 patent); U.S. Pat. No. 6,911,622 (the '622 patent); U.S. Pat. No. 6,878,899 (the '899 patent); U.S. Pat. No. 6,727,458 (the '458 patent); U.S. Pat. No. 6,573,473 (the '473 patent); published PCT Application No. WO 2004 / 114192 (the '4192 publication); published U.S. Patent Publication No. 2005 / 0150880 (the '0880 publication); and U.S. Pat. No. 6,987,786 (the '786 patent).BACKGROUND OF THE INVENTION

[0003] 1. Field of the Invention

[0004] The present invention relates to a method and system for adaptively controlling a laser-ba...

Claims

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