Probe and cantilever
a technology of cantilever and cantilever, which is applied in the field of cantilever, can solve the problems of reducing the mechanical strength of the probe, complex process, and defect of the grown crystal of the probe,
Inactive Publication Date: 2009-02-12
NAMIKI PRECISION JEWEL CO LTD
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Benefits of technology
The present invention relates to a probe for use in a scanning probe microscope (SPM) that can be easily manufactured and used while allowing full use of the properties of a single-crystalline material and a cantilever. The probe has a needle-like part with a length of not less than 10 μm and a flat plate part with a face that indicates the crystal orientation of the single-crystalline material. The technical effect of this invention is to provide a probe that can be easily manufactured and used while allowing full use of the properties of a single-crystalline material and a cantilever.
Problems solved by technology
The method according to the method of Patent Document 1, wherein a probe comprising diamond is formed on the beam part of a cantilever, however, involves many compulsory steps, such as resist and nitride film formation and removal, and therefore has a complicated process.
Consequently, the grown crystal of the probe can often be defective and have a drawback of reducing the mechanical strength of the probe.
Thus, this method involves two interfaces between the stylus and the cantilever, and consequently has a high possibility of a shift of the crystal orientation of the diamond on each interface and hence a drawback of being unable to manufacture a probe that makes fall use of the properties of the material.
Method used
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[0060]A rectangular parallelepiped single crystal diamond was prepared which had a {100} plane in its top face, a bottom of 50 μm square, and a thickness of 100 μm. The crystal orientation of the single crystal diamond was defined by the top face with {100} plane and the directions of both side faces with {110}. After polishing each face of the single crystal diamond, a thin nickel film 1 μm thick was formed on its top face. Then, an opening with a diameter of approximately 10 nm was cut in the thin nickel film by means of electron beam lithography. When all set, thermochemical processing was carried out to fuse a 50 μm thick layer around the single crystal diamond except the opening into the thin nickel film and form a needle-like part thereon. As the result, a probe made of a single crystal diamond was formed with a needle-like part having a length of 50 μm long and a point diameter of 10 nm, and a bottom diameter of approximately 10 μm around the boundary with the flat plate part...
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[Object of the Invention] To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe.[Solution] A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 μm or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.
Description
FIELD OF THE INVENTION[0001]The present invention relates to a probe for use in a scanning probe microscope comprising a single-crystalline material having various properties and a cantilever onto which the probe is disposed.DESCRIPTION OF RELATED ART[0002]Scanning probe microscopes (hereafter SPM) are widely used as instruments for observing material surfaces in nanoscale resolution. An SPM obtains images using atomic forces and other interactions that occur between the probe tip and a sample surface.[0003]A probe constituting the key part of an SPM is required to have an atomically sharp point. Generally, when manufactured using a single-crystalline material, a probe can easily be formed to have a sharp point. As measurement and observation needs for sample materials with high aspect ratios have been rising, in particular, over the recent years, there is increasingly high demand for probes with a long needle part. Accordingly, single-crystalline materials are increasing the import...
Claims
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IPC IPC(8): G12B21/02G01Q60/38G01Q70/10G01Q70/16
CPCB82Y35/00G01Q70/10G01Q60/38
Inventor KOYAMA, KOUJIKOTAKI, TOSHIROSUNAGAWA, KAZUHIKO
Owner NAMIKI PRECISION JEWEL CO LTD