System and method for fabricating photovoltaic cells

Abstract

A substrate processing system includes a source unit configured to supply a deposition material to a substrate, a substrate holder configured to hold a substrate to receive the deposition material, a shadow mask comprising a frame that includes two opposing arms; and a crossbar configured to be mounted to the two opposing arms. The frame and the crossbar define a plurality of openings that allow the deposition material supplied by the source unit to be deposited on the substrate. A transport mechanism can produce relative movement between the shadow mask and the substrate.

Description

[0001]The present application is a Continuation patent application of and claims priority to commonly assigned pending U.S. patent application Ser. No. 11 / 953,069, entitled “Improved system and process for fabricating photovoltaic cell”, filed by the same inventors on Dec. 9, 2007, which in turn claims priority to commonly assigned provisional U.S. patent application Ser. No. 60 / 869,728, entitled “A simplified process flow for thin film photovoltaic solar cell production”, filed Dec. 13, 2006, the disclosure of which is incorporated by reference herein.TECHNICAL FIELD[0002]This application relates to the fabrication of multi-layer thin film devices, specifically, the fabrication of photovoltaic cells and modules.BACKGROUND OF THE INVENTION[0003]A photovoltaic device converts light into voltage and electrical current. The voltage output of a photovoltaic device depends on its material composition and device structure. Examples of photovoltaic materials include single-crystalline sili...

AI Technical Summary

Benefits of technology

The present invention relates to a substrate processing system and method for fabricating solar-cell modules. The system includes a source unit for supplying deposition material, a substrate holder for holding the substrate, and a shadow mask with a frame and crossbar for depositing patterns on the substrate. The system also includes a transport mechanism for producing relative movement between the shadow mask and the substrate. The method involves depositing semiconductor materials through the openings of the shadow mask to form junction structures on the substrate. The system and method provide simpler, cleaner, and more reliable processes for manufacturing solar-cell modules, with improved performance and reduced manufacturing costs. The system can also fabricate multiple layers in photovoltaic cells in continuous processing, improving manufacturing throughput and cost.

Problems solved by technology

Additionally, the disclosed systems and methods do not include the roughness associated with cutting or etching on the surface after patterning in those conventional systems.

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