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Combinatorial Method for Solid Source Doping Process Development

Inactive Publication Date: 2015-05-21
INTERMOLECULAR
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patent describes a method for depositing materials on small spots on a surface using a combination of small spot showerheads. These showerheads can be used in a larger showerhead to deposit multiple layers of materials. The method also allows for control over the annealing process using laser annealing or site-isolated rapid thermal processing. The technical effect of this patent is the ability to deposit materials in a combinatorial manner, resulting in more efficient and precise deposition of materials on small spots.

Problems solved by technology

However, the CVD and ALD adaptations of HPC techniques generally deposit materials on relatively large areas of the substrate.

Method used

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  • Combinatorial Method for Solid Source Doping Process Development
  • Combinatorial Method for Solid Source Doping Process Development
  • Combinatorial Method for Solid Source Doping Process Development

Examples

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Embodiment Construction

[0019]A detailed description of one or more embodiments is provided below along with accompanying figures. The detailed description is provided in connection with such embodiments, but is not limited to any particular example. The scope is limited only by the claims and numerous alternatives, modifications, and equivalents are encompassed. Numerous specific details are set forth in the following description in order to provide a thorough understanding. These details are provided for the purpose of example and the described techniques may be practiced according to the claims without some or all of these specific details. For the purpose of clarity, technical material that is known in the technical fields related to the embodiments has not been described in detail to avoid unnecessarily obscuring the description.

[0020]Before various embodiments are described in detail, it is to be understood that unless otherwise indicated, this invention is not limited to specific layer compositions ...

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Abstract

One or more small spot showerhead apparatus are used to provide dopant exposure and / or to deposit materials using CVD, PECVD, ALD, or PEALD on small spots in a site isolated, combinatorial manner. The small spot showerheads may be configured within a larger combinatorial showerhead to allow multi-layer film stacks to be deposited in a combinatorial manner. Anneal processes where the area of the process can be controlled such as laser annealing or site-isolated rapid thermal processing (RTP) can be used to vary the annealing conditions in a combinatorial manner.

Description

FIELD OF THE INVENTION[0001]The present invention relates generally to methods for the deposition of materials on site isolated regions of a substrate in a combinatorial manner. The apparatus is operable to deposit materials using chemical vapor deposition (CVD) or atomic layer deposition (ALD) technologies. Additionally, the apparatus is compatible with the plasma enhanced versions of these technologies (i.e. PECVD and PEALD).BACKGROUND OF THE INVENTION[0002]The manufacture of semiconductor devices, TFPV modules, optoelectronic devices, etc. entails the integration and sequencing of many unit processing steps. As an example, device manufacturing typically includes a series of processing steps such as cleaning, surface preparation, deposition, patterning, etching, thermal annealing, and other related unit processing steps. The precise sequencing and integration of the unit processing steps enables the formation of functional devices meeting desired performance metrics such as effici...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L21/324H01L21/22H01L21/66H01L21/02
CPCH01L21/324H01L21/02301H01L22/14H01L21/22H01L21/02164H01L21/2252H01L22/20C23C16/04C23C16/45563C23C16/45574C40B40/18C40B50/14C40B60/14B01J2219/0036B01J2219/00441B01J2219/00443B01J2219/00495B01J2219/00596B01J2219/00745B01J2219/00756H01L21/2254H01L21/2258
Inventor AHMED, KHALED
Owner INTERMOLECULAR