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Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument

a surface acoustic wave and oscillator technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostriction/magnetostriction machines, electrical instruments, etc., can solve the problem of not being able to find a cut angle substrate having the kind of temperature characteristics, and achieve high reflection coefficient

Active Publication Date: 2012-05-29
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0017]According to the surface acoustic wave resonator with these kinds of characteristic, it is possible to realize an exhibition of good frequency-temperature characteristics in an operating temperature range. Also, by having these kinds of characteristic, it is possible to suppress the deterioration of environmental resistance characteristics accompanying an increase in the electrode film thickness.Application Example 4

Problems solved by technology

Also, in Japanese Patent No. 3,851,336, as well as describing a configuration for making a curve indicating the frequency-temperature characteristics a tertiary curve in a SAW device using an LST cut quartz crystal substrate, it is described that, in a SAW device using a Rayleigh wave, it has not been possible to find a cut angle substrate having the kind of temperature characteristics indicated by a tertiary curve.

Method used

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Examples

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Embodiment Construction

ill be given, while referring to the drawings, of an embodiment according to a surface acoustic wave resonator and surface acoustic wave oscillator of the invention.

[0096]Firstly, referring to FIG. 1, a description will be given of a first embodiment according to the surface acoustic wave (SAW) resonator of the invention. Of FIG. 1, FIG. 1(A) is a plan view of the SAW resonator, FIG. 1(B) is a partial enlarged sectional view, FIG. 1(C) is an enlarged view for describing details of FIG. 1(B), and FIG. 1(D) is a diagram which, relating to the partial enlarged view of FIG. 1(C), is for describing an IDT electrode finger line occupation rate η identification method in the event that the sectional shape is not rectangular but trapezoidal, which is a conceivable sectional shape when the SAW resonator according to the invention is manufactured using a photolithography technique and an etching technique. It is appropriate that the line occupation rate η is a proportion occupied by a width L...

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PUM

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Abstract

A SAW resonator which, using a quartz crystal substrate with Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, and 42.79°≦|105|≦49.57°, includes an IDT which excites a stop band upper end mode SAW, and grooves hollowed out of the substrate positioned between electrode fingers configuring the IDT, wherein, when the wavelength of the SAW is λ and the depth of the inter-electrode finger grooves is G, λ and G satisfy the relationship of 0.01λ≦G and wherein, when the line occupation rate of the IDT is η, the groove depth G and line occupation rate η satisfy the relationships of −2.0000×G / λ+0.7200≦η≦−2.5000×G / λ+0.7775 provided that 0.0100λ≦G≦0.0500λ, −3.5898×G / λ+0.7995≦η≦−2.5000+G / λ+0.7775 provided that 0.0500λ<G≦0.0695λ.

Description

TECHNICAL FIELD[0001]The present invention relates to a surface acoustic wave resonator, and to a surface acoustic wave oscillator in which the resonator is mounted, and in particular, relates to a type of surface acoustic wave resonator wherein grooves are provided in a substrate surface, and to a surface acoustic wave oscillator in which the resonator is mounted.BACKGROUND ART[0002]In a surface acoustic wave (SAW) device (for example, a SAW resonator), the effect of a SAW stop band, piezoelectric substrate (for example, quartz crystal substrate) cut angle, IDT (interdigital transducer) formation shape, and the like, on changes in frequency-temperature characteristics is considerable.[0003]For example, a configuration exciting each of a SAW stop band upper end mode and lower end mode, the distribution of standing waves in each of the stop band upper end mode and lower end mode, and the like, are disclosed in JP-A-11-214958.[0004]Also, points for which the SAW stop band upper end mo...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): H03H9/25
Inventor YAMANAKA, KUNIHITO
Owner SEIKO EPSON CORP
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