Narrow-band filter array with multi-cavity structure

Abstract

This invention discloses one thin band filter array with multiple chambers structures, which uses multiple F-P structure film system to form multiple chamber and forms resonance chamber array through composite coating film or etching method to achieve band pass peak of each micro thin band filter to realize the integration of different band pass filter slices. This structure is suitable for each wave section multi-chamber filter array.

Description

technical field [0001] The invention relates to an optical filter, in particular to a narrow-band filter array with a multi-cavity structure. Background technique [0002] Spectroscopic technology is one of the core technologies in multispectral detection technology. It has been widely used in environmental monitoring, biomedicine, science and technology agriculture, industrial process monitoring, as well as in ground or aviation and aerospace fields for missiles, meteors, clouds, rain, landforms, etc. Military and civilian fields such as the detection of targets and their backgrounds. Traditional spectroscopic methods mainly include gratings, prisms, filter wheels, and Fourier transform methods. Although most of these methods can perform full-spectrum scanning and high resolution, their disadvantages are that they all involve mechanical transmission devices, which not only limit the speed of information readout, but also greatly reduce the vibration resistance and reliabil...

AI Technical Summary

Problems solved by technology

However, the integrated optical filter arrays prepared by these methods are all single-cavity structures. Although they have the basic functions of integrated optical filter arrays and can achieve the purpose of light splitting, their band-pass rectangularity (or waveform) is still not enough. Well, in this way, the utilization rate of the signal in the band-pass range is not high enough, and it is difficult to really meet the engineering and practical requirements

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