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Phase regulatable type pupil filter and its manufacturing method

A pupil filter and phase-type technology, which is applied in the field of adjustable phase-type pupil filters, can solve the problems of high cost and complex process of making phase-type pupil filters, and achieve the effect of simplifying production and reducing costs

Inactive Publication Date: 2008-03-05
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
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  • Application Information

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Problems solved by technology

[0008] The problem to be solved by the present invention is to overcome the problems existing in the production of phase-type pupil filters by the above-mentioned etching method, and provide an adjustable phase-type pupil filter and its manufacturing method, thereby solving the problem of making phase-type pupil filters by the above-mentioned etching method. The disadvantages of complex filter process and high cost, and the phase is adjustable

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  • Phase regulatable type pupil filter and its manufacturing method
  • Phase regulatable type pupil filter and its manufacturing method

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Embodiment Construction

[0022] The illumination part of the imaging system with a two-zone adjustable single-element phase pupil filter is shown in Figure 2. A beam of collimated laser light becomes linearly polarized light after passing through the polarizer 4, and the angle of the polarizer is rotated so that the direction of polarization of the outgoing light is consistent with that of the quartz crystal 2 in the two-zone phase-type single crystal pupil filter 5 The tangential direction of the surface is consistent. The two-zone phase-type single-crystal pupil filter is shown in Figure 1, where r is taken as the normalized radius, and a is the corresponding normalized mask radius. The central area is a quartz uniaxial crystal (principal refractive indices are n o = 1.54425 and n c =1.55336)2, radius a, thickness 1mm, the outer ring is ring-shaped K9 glass (refractive index 1.5163)1 with radii r and a respectively, same thickness 1mm. The two are bonded together through resin glue 3 . Then they...

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Abstract

A phase-adjustable pupil filter is composed of polarizer, monocrystal pupil filter, and precisely adjustable optical supporter for said monocrystal pupil filter. Said monocrystal pupil filter is prepared by traditional optical processing method, and is composed of monocrystal wafer and concentrical medium ring. Its advantages are simple preparing process, and low cost.

Description

Technical field: [0001] The invention belongs to an optical diffraction element, in particular to an adjustable phase pupil filter and a manufacturing method thereof. Background technique: [0002] Phase pupil filter is a kind of diffractive optical element that can control the distribution of light wavefront. At present, the production of phase-type pupil filters is mainly based on the production process of binary optics (Thomas J Suleski, Donald C O'shea. Gray-scale Masks for diffractive-optics fabrication: 1. Commercial slide images. Applied Optics, 1995 , 34(32): 7507-7517.). Binary optical devices with stepped profiles are fabricated using standard LSI production processes, which are divided into two process approaches, additive and subtractive. The fabrication process of the phase-type binary optical device is described below by taking the subtraction process (etching method) as an example. The first is to make a mask plate of black and white patterns, use photolith...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/00G02B27/46G02B27/44G02F1/01
Inventor 肖繁荣王桂英徐至展
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI