Electric tuning integrated optical filter with high-fineness
An optical filter and electrical tuning technology, applied in the coupling of optical waveguides, electromagnetic wave transmission systems, optics, etc., can solve the problems of slow electro-optical tuning filters, low spectral precision, large insertion loss, etc., and achieve spectral adjustment. Wide range, high spectral finesse, and easy-to-integrate effects
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[0035] Selection: Straight waveguides 3, 4, 5 are 6-8 μm wide and 1-1.5 cm long; the refractive index of annular cavity 2 is about 1.5; the ellipse length of ring waveguide cross section is 6-8 μm, and the ellipse width is 4 μm; signal distribution in straight waveguide 1 The ratio to the straight waveguide 2 and the ring waveguide 3 is 5:95; the thickness of the heating resistor is 1 μm; the lead wire of the heating electrode is formed by pressure welding of gold wire or aluminum wire. According to the technical scheme of the present invention, a high-precision electronically tunable integrated optical filter is formed. After use, it can be known that the high-precision electronically tunable integrated optical filter provided by the present invention can achieve spectral fineness (kHz level).
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