Photon crystal filter with high resolution
A photonic crystal, high-resolution technology, used in light guides, optics, instruments, etc., can solve problems such as low resolution and photonic crystal plate loss, and achieve the effect of improving filtering efficiency
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[0033] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
[0034] Such as figure 1 As shown, this embodiment takes a two-dimensional flat photonic crystal filter as an example to illustrate the present invention. In this embodiment, for example, an electron beam exposure system is used to process a photonic crystal device on a SOI (English full name is Silicon on Insulator, SOI for short) substrate. The thickness of the silicon film of the SOI sample is, for example, 235 nanometers, and the thickness of the buried layer of silicon dioxide is, for example, 375 nanometers. , the bottom layer is a silicon substrate, and the total thickness of the entire substrate is 0.5 mm. Using such as photoresist PMMA495 as an etching mask, this photoresist has good exposure characteristics and resolution, using the Raith150 electron beam exposure system produced by the German Raith company to define the photonic cryst...
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