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Photon crystal filter with high resolution

A photonic crystal, high-resolution technology, used in light guides, optics, instruments, etc., can solve problems such as low resolution and photonic crystal plate loss, and achieve the effect of improving filtering efficiency

Inactive Publication Date: 2009-06-24
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, optimizing the distance between the resonant cavity and the heterojunction interface is a very complicated work, and this optimization is very important for realizing the feedback effect, and in practical applications, a curved waveguide must also be introduced, and this curved waveguide will Introduces rather severe losses in two-dimensional photonic crystal slabs
Another example is the technology disclosed by the Notomi group in Document 3: "A.Shinya, S.Mitsugi, E.Kuramochi, and M.Notomi, Opt.Express 13, 4202 (2005)." It is proposed to use the width of the waveguide as a feedback way, but the technology still has the disadvantage of too low resolution

Method used

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  • Photon crystal filter with high resolution
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  • Photon crystal filter with high resolution

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Embodiment Construction

[0033] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:

[0034] Such as figure 1 As shown, this embodiment takes a two-dimensional flat photonic crystal filter as an example to illustrate the present invention. In this embodiment, for example, an electron beam exposure system is used to process a photonic crystal device on a SOI (English full name is Silicon on Insulator, SOI for short) substrate. The thickness of the silicon film of the SOI sample is, for example, 235 nanometers, and the thickness of the buried layer of silicon dioxide is, for example, 375 nanometers. , the bottom layer is a silicon substrate, and the total thickness of the entire substrate is 0.5 mm. Using such as photoresist PMMA495 as an etching mask, this photoresist has good exposure characteristics and resolution, using the Raith150 electron beam exposure system produced by the German Raith company to define the photonic cryst...

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Abstract

The invention discloses a high-resolution photonic crystal filter. The filter includes a photonic crystal; it is characterized in that it also includes an input waveguide, a first output waveguide and a second output waveguide formed on the photonic crystal, and each of the input waveguide, the first output waveguide and the second output waveguide have a closed end. There are two point defect cavities between the first and second output waveguides and the input waveguide. The vertices of the photonic crystals at both ends of the first point defect cavity move outwards by a first distance respectively, and the vertices of the photonic crystals at both ends of the second point defect cavity move outwards respectively by a second distance, and the second distance is greater than the first distance. The invention improves the filtering efficiency, can realize fine filtering, and is more suitable for application in high-density optical integration systems.

Description

technical field [0001] The invention relates to photonic crystal filter technology, in particular to a high-resolution photonic crystal filter capable of realizing nanoscale wavelength resolution. Background technique [0002] The two-dimensional photonic crystal plate has an in-plane photonic crystal band gap, and it is relatively easy to manufacture by using the current micromachining technology. Therefore, by introducing various artificial defects, a variety of optical devices can be realized, such as photonic crystal waveguides, resonant cavities , end-to-coupler and photonic crystal filter etc. As a current research hotspot, photonic crystal filters can be widely used in many fields, such as photonic integrated pathways, communications and quantum information processing. In the known technology, many different types of photonic crystal filters are designed and manufactured by researchers, such as Noda group in literature 1: "A.Chutinan, M.Mochizuki, M.Imada, and S.Noda...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/28G02B6/122
Inventor 任承陶海华刘娅钊李志远程丙英张道中
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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