Hartman wave front sensor to realize alignment function by light splitter and testing method thereof

A spectroscopic device and sensor technology, which is used in the testing of machine/structural components, optical instrument testing, optical components, etc. It can solve the problem that the measured beam and the optical axis of the system deviate, it is difficult to adjust the incident wavefront, and the wavefront measurement error becomes larger. and other problems, to achieve the effect of improving measurement accuracy, small detection error, and reducing requirements
CN100573080CInactive Publication Date: 2009-12-23INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Publication Date
2009-12-23
Estimated Expiration
Not applicable · inactive patent

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Abstract

Hartmann wavefront sensor and detection method using spectroscopic device to achieve alignment function, two parts of rough alignment and fine alignment are added to the original system, wherein the rough alignment part includes: imaging screen with holes, light splitting The device, the rough alignment detection system, and the fine alignment part include: a focusing lens, a fine alignment beam splitter, and a fine alignment detection system. After the two steps of rough alignment and fine alignment, the incident beam can quickly and easily enter the measurement field of view of the microlens array, and can be strictly coaxial with the system, thereby improving the measurement accuracy of the Hartmann system; At the same time, the Hartmann wavefront sensor can conveniently detect positive lenses, negative lenses, convex mirrors, concave mirrors, plane mirrors, etc. The invention can display the adjustment results in real time, and has the characteristics of being intuitive and easy to understand, thereby reducing the requirements for users and reducing the adjustment time; and the device used in the invention has low specification requirements, low prices, and easy to buy. .
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Description

technical field

[0001] The present invention relates to a Hartmann wavefront sensor, a precision instrument for measuring the wavefront shape, in particular to a Hartmann wavefront sensor that can simply, quickly and accurately adjust the self-collimated beam or the measured beam to enter the measurement field of view. wavefront sensor. Background technique

[0002] The Hartmann wavefront sensor is an instrument that can detect the wavefront shape, and it has been widely used in optical mirror detection, medical instruments and celestial object imaging. In the previous Hartmann wavefront sensor, it usually only includes a measurement light source system, a beam matching system, a microlens array, a photodetector (usually a CCD) and a data processing system. Before the Hartmann wavefront sensor is used, the measured wavefront must be adjusted within the measurement field of view of the microlens array; in the past, the adjustment was made by observing the spot position in th...

Claims

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