Hartman wave front sensor to realize alignment function by light splitter and testing method thereof

Abstract

Hartmann wavefront sensor and detection method using spectroscopic device to achieve alignment function, two parts of rough alignment and fine alignment are added to the original system, wherein the rough alignment part includes: imaging screen with holes, light splitting The device, the rough alignment detection system, and the fine alignment part include: a focusing lens, a fine alignment beam splitter, and a fine alignment detection system. After the two steps of rough alignment and fine alignment, the incident beam can quickly and easily enter the measurement field of view of the microlens array, and can be strictly coaxial with the system, thereby improving the measurement accuracy of the Hartmann system; At the same time, the Hartmann wavefront sensor can conveniently detect positive lenses, negative lenses, convex mirrors, concave mirrors, plane mirrors, etc. The invention can display the adjustment results in real time, and has the characteristics of being intuitive and easy to understand, thereby reducing the requirements for users and reducing the adjustment time; and the device used in the invention has low specification requirements, low prices, and easy to buy. .

Description

technical field [0001] The present invention relates to a Hartmann wavefront sensor, a precision instrument for measuring the wavefront shape, in particular to a Hartmann wavefront sensor that can simply, quickly and accurately adjust the self-collimated beam or the measured beam to enter the measurement field of view. wavefront sensor. Background technique [0002] The Hartmann wavefront sensor is an instrument that can detect the wavefront shape, and it has been widely used in optical mirror detection, medical instruments and celestial object imaging. In the previous Hartmann wavefront sensor, it usually only includes a measurement light source system, a beam matching system, a microlens array, a photodetector (usually a CCD) and a data processing system. Before the Hartmann wavefront sensor is used, the measured wavefront must be adjusted within the measurement field of view of the microlens array; in the past, the adjustment was made by observing the spot position in th...

AI Technical Summary

Problems solved by technology

Compared with the incident light path, the measurement field of view of the microlens array is usually very small, and the light spot in the sub-aperture will shift greatly when the measured object changes a small angle, so it is difficult to adjust the incident wavefront into the micro Measuring Field of View of Lens Array

Therefore, in the process of using the Hartmann wavefront sensor, too much energy is spent on alignment; and it is easy to cause the measured beam to deviate from the optical axis of the system, resulting in a larger measurement error of the wavefront

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