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Vertical straight line pedestal method and apparatus

A reference device, vertical technology, applied in the direction of measuring devices, instruments, measuring instrument components, etc., can solve the problems of small radial support rigidity, complex porous bearing manufacturing, poor anti-interference ability, etc., to improve radial stiffness and Angular stiffness, control and adjustment are simple and convenient, and the effect of enhanced anti-interference ability

Inactive Publication Date: 2010-02-17
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The air bearing guide rail with this structure has the following problems in use: First, the radial support rigidity is small and the anti-interference ability is poor. Therefore, when there is impact and disturbance, the thickness of the air film in the X and Y directions changes slightly, It is manifested as the slight "vibration" of the moving parts; the second is that the medium and high-frequency micro-vibrations of the moving parts caused by the disorder of the air film in the air-floating guide rail system lead to the unsmooth linear motion trajectory of the motion system and poor motion repeatability; the third is that the moving parts are in the In the positioning state, due to internal and external disturbances, the positioning stability and reliability of the motion system are poor, especially in the direction of the column along the guide rail, there are random micro "vibrations"
These guide rails take some control measures on the structure to obtain higher stiffness or controllable stiffness, but their structure is more complicated, the control and adjustment are more cumbersome, the implementability is poor, and the effect is not obvious
The National University of Defense Technology proposed a new type of aerostatic guide rail using porous throttling. The basic principle is to use the microstructure of porous materials to throttling, and at the same time set shallow grooves on the surface of the guide rail that communicate with the porous throttling device. , using the impedance of the groove to form a secondary throttling to achieve the purpose of improving the stiffness and carrying capacity of the air guide rail, but the porous bearing is more complicated to manufacture and easy to block

Method used

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  • Vertical straight line pedestal method and apparatus
  • Vertical straight line pedestal method and apparatus
  • Vertical straight line pedestal method and apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Such as figure 1 with figure 2 As shown, first construct a four-sided fully enclosed vertical air bearing guide rail as a linear motion guide reference. The guide column 1 and the air flotation guide sleeve 2 are assembled into a vertical air flotation guide rail. The guide column 1 is a fixed part, which provides a linear motion guiding reference, and its base is fixed on a stable substrate; the air flotation guide sleeve 2 is a moving part. An air film 3 is built between the mating surface of the floating guide sleeve 2 and the guide column 1 to form gas bearing and lubrication. Fill the air film 3 with compressed gas of appropriate pressure, and the air film supporting force that the air flotation guide sleeve 2 bears is F 1 , at the gas film supporting force F 1 Under the action of the air bearing guide sleeve 2 is separated from the working surface of the guide column 1, completely floats around the guide column 1, and moves up and down along the guide column 1...

Embodiment 2

[0034] Such as Figure 4 As shown, it is the M of the solid phase 4 in the guide column 1 1 , N 1 , M 2 and N 2 The four surfaces are all two-point configurations, and this configuration structure is suitable for occasions that require high support rigidity and disturbance of the guide rail. Other components and working principles of this embodiment are the same as those of Embodiment 1.

Embodiment 3

[0036] Such as Figure 5 As shown, it is the M of the solid phase 4 in the guide column 1 1 , N 1 , M 2 and N 2 All four surfaces are single-point centered configuration structures, and other components and working principles of this embodiment are the same as those of Embodiment 1.

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Abstract

A vertical beeline benchmark method and device belong to the technical field of precision instruments and measurement. A solid phase is introduced between the movable part and the fixation part of a totally closed vertical aerostatic slideway, which can keep synchronized movement with the movable part, and act on the corresponding aerostatic working surface of the fixation part in a soft frictionmanner with one side or two sides, the contact pressure is F2, the movable part is in an open or closed supporting state; in the condition that the gas film supporting force F1 is greater than the contact pressure F2, the F1 and F2 are parameter optimized, and the gas film supporting force and the contact pressure are adjusted correspondingly; and the solid phase in the device is arranged in the inside or outside of the gas film. Under the precondition of retaining the original precision of the aerostatic slideway, the invention significantly enhances the supporting stiffness and the anti-jamming capability of the aerostatic slideway, and improves the movement stability and the positioning stability.

Description

technical field [0001] The invention belongs to the technical field of precision instruments and measurement, and in particular relates to a vertical straight line reference method and device. Background technique [0002] When the air bearing guide rail is used in a vertical state, it is often used as a high-precision vertical linear reference in precision / ultra-precision measuring instruments, test equipment and manufacturing equipment. At present, the commonly used vertical air bearing guide rail is mainly composed of air bearing guide sleeve and guide rail column. After the air film gap is built between the air bearing guide sleeve and the guide rail column to form gas support and lubrication, under the action of the motor and other driving systems, The air bearing guide bush and the load placed on it move up and down along the guide rail column. The air bearing guide rail with this structure has the following problems in use: First, the radial support rigidity is small...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D11/00
Inventor 谭久彬黄景志金国良杨文国
Owner HARBIN INST OF TECH