Reusable parameter module model building method for space contineous deformation MEMS

A modeling method, parametric technology, applied in chemical instruments and methods, electrical components, electrical digital data processing, etc.

Inactive Publication Date: 2007-10-10
NORTHWESTERN POLYTECHNICAL UNIV
View PDF0 Cites 11 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the disadvantage that the prior art cannot be used to describe MEMS devices with space continuous deformation behavior charac

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Reusable parameter module model building method for space contineous deformation MEMS
  • Reusable parameter module model building method for space contineous deformation MEMS
  • Reusable parameter module model building method for space contineous deformation MEMS

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Implementation Example 1: A method for establishing a component model of an electrostatically actuated microbeam.

[0022] Step 1: Determine the dynamic control equations and boundary condition equations describing each energy domain and its coupling state according to the energy domains and coupling modes involved in the electrostatically actuated microbeam.

[0023] Figure 2 is a schematic diagram of a dual-terminal fixed electrostatically actuated microbeam structure, which is a common structure in MEMS systems and is widely used in devices such as RF switches, micro-accelerometers, and pressure sensors. When a voltage V is applied between the upper and lower electrodes, the upper electrode is deformed under the action of electrostatic attraction, and the magnitude of the electrostatic force received by each point on the beam is related to the deflection of this point. The axis of the beam when it is not deformed, that is, the straight line connecting the centroids o...

Embodiment 2

[0043] Implementation example 2: a method for establishing a component model of a capacitive pressure sensor.

[0044] Step 1: Determine the dynamic control equations and boundary condition equations describing each energy domain and its coupling state according to the energy domain and its coupling mode involved in the capacitive pressure sensor.

[0045] Accompanying drawing 5 is a structural schematic diagram of a capacitive pressure sensor, and its elastic element is composed of diaphragms fixed around it. The deformation equation of the diaphragm after being subjected to external pressure and electrostatic pressure can be described as:

[0046] D ∂ 4 w ∂ x 4 + 2 D ∂ 4 w ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

A modeling method of reusable parameterized component for space continuous deformation MEMS includes confirming each dynamic control equation and boundary condition equation of MEMS device, carrying out space discretization on dynamic control equation and converting said control equation to be constant-differential equation set, utilizing hardware description language of analog and mixed signal to carry out coding for realizing function description, plotting schematic diagram of MEMS device and connecting said diagram with code to form MEMS device being called in system modeling and in simulation analysis.

Description

technical field [0001] The invention relates to a method for establishing a model of a micro-electro-mechanical system (MEMS) device, belonging to the field of computer-aided design (MEMS CAD) of a micro-electro-mechanical system. Background technique [0002] With the improvement of integration, the demand for MEMS system-level design will become more and more urgent. System-level design focuses on modeling and performance simulation of the entire microsystem (including mechanical structures, circuits, and multi-domain coupling components, etc.). Due to the difficulty and complexity of related work, how to establish a model that can accurately express device behavior and realize reusable parametric component models has become a key issue, which is crucial for the development of MEMS CAD technology and the improvement of MEMS design efficiency and R&D level. [0003] Among the existing MEMS system-level modeling methods, the nodal analysis method can establish a parameteriz...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G06F17/50B81C5/00B81C99/00
Inventor 马炳和张承亮吕湘连苑伟政
Owner NORTHWESTERN POLYTECHNICAL UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap