Optical angle gauge test calibrator utilizing mutual orthogonal double-frequency laser interferometer

Abstract

The invention discloses a high accuracy use mutual orthogonal two double frequencies laser interferometer optics angle gauge testing marking apparatus, which includes controlled computer 1, double frequency laser interferometer A3 and rays direction 2,the static reflector 4 and the motion reflector 7 of placed in turn according to light path direction, double frequency laser interferometer B13 which mutually vertical laying aside with double frequency laser interferometer A3 rays path, the long baseline spectroscope 11, the long baseline reflector 6, the optical path compensate parallel glass plate 5 and the measured photometry angle gauge 9 which in turn placed according to the double frequency laser interferometer B13 light path, and also includes migration precise translation 8, small rotation precise angular displacement 10 and step motor control box 12 of making the measured optic angle gauge 9 along the main section direction move. The invention has the following remarkable merit: through the invention installment survey optics angle gauge angle of deviation in 2'-10'survey scope, the measuring accuracy may achieve 0.02', enormously increased optics angle gauge angle of deviation angular accuracy. Uses the mutual orthogonal double frequency laser interferometer take a bearing, reduced the optical material refractive index and the interference fringe interprets and so on other factors influence to take a bearing precision.

Description

technical field

[0001] The invention belongs to the field of small-angle measurement and measurement, and relates to a method and a device for realizing high-precision measurement and calibration of the deflection angle generated by monochromatic light passing through an optical angle gauge. The calibrated optical angle gauge can be used as a standard small-angle generator or a small-angle reference to complete the test and calibration of the indication error of the autocollimator micrometer, theodolite subdivision reading system, and goniometric instruments. Background technique

[0002] Small-angle metrology is an important part of metrology science. With the upgrading and industrialization of photoelectric digital image testing instruments, the demand for small-angle measurement is increasing, and the requirements for its accuracy are also getting higher and higher. In the aerospace measurement and control system, a high-precision small-angle generator is required to pro...

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