Organic pressure sensor and its use method

A pressure sensor, an organic technology, applied in the field of sensors, can solve the problems of large volume, heavy weight, and pressure sensing components that cannot be further miniaturized, and achieve the effect of high sensitivity and easy realization

Inactive Publication Date: 2007-11-14
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Most of these components are relatively large in size and heavy in weight, and the pressure sensing components cannot be further miniaturized, and it is not easy to form a large array of micro components, and its rigid device structure also prevents the device from being bent

Method used

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  • Organic pressure sensor and its use method
  • Organic pressure sensor and its use method
  • Organic pressure sensor and its use method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Embodiment 1, as shown in Figure 1, on the ITO electrode that takes glass as substrate, evaporate the organic small molecule material Alq of 70 nanometers thick with vacuum evaporation method, then evaporate the aluminum electrode (as shown in Figure 2) of 140 nanometers thick (A)), with ITO as the anode, aluminum as the cathode, plus a DC voltage of 0.1V, using a 100-gram weight as the applied pressure, the device area is 3 × 4 mm, using a silicon chip with a size of 0.88 × 0.69 cm A piece of rubber was covered with 0.1 mm thick rubber as a medium for uniformly applying pressure, and the change of current passing through the device over time was measured. The process of applying pressure was performed manually, and the duration was about 0.2 seconds, and the longest did not exceed 0.8 seconds. The relationship of current variation with time can be obtained as shown in Figure 3. It can be seen that the sensitivity of the device is very high, and the magnitude of the curr...

Embodiment 2

[0027] Example 2, as shown in FIG. 2(A), the structure of the organic pressure sensor is ITO / Alq(60nm) / Al(160nm), and the current varies with time under a fixed voltage (5V). There is a significant increase in current at certain moments when the pressure indicated in the figure is applied. By changing the methods and conditions of preparation and testing, changing the structure and materials of the device, etc., the performance of the device can be further optimized.

Embodiment 3

[0028] Embodiment 3, as shown in Figure 2 (B), etches a trench on the ITO glass, the trench width is controlled between 0.1 ~ 10 microns, evaporates and deposits an organic thin film Alq with a thickness of 500nm, and uses a polished silicon wafer Covering the film and applying pressure on it, it can be tested that there is an obvious piezoresistive characteristic between the two electrodes.

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Abstract

This invention belongs to the area of sensor technology; concretely it is an organic pressure transmitter and the application method. This sensor's sensitive material adopts the organic material, including the organic conjugate small member semi conducting material, the small molecular material adulterant and so on. This pressure transmitter is sensible, its volume is small, the weight is light, the cost is low, and especially suitable to make the curving pressure transmitter array. This invention may be used in robot's pressure sensation, the sense of touch as well as in the industry automatic control relates to pressure transmitter and the array, the application prospect is broad.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a pressure sensor using an organic conjugated small molecule semiconductor material as a sensitive material and a use method thereof. Background technique [0002] At present, the commonly used pressure sensors include strain gauge pressure sensors, ceramic pressure sensors, diffused silicon pressure sensors, piezoelectric pressure sensors, and semiconductor (mainly silicon) pressure sensors, etc. There are also conductive rubber pressure sensor elements doped with graphite particles. Most of these components are relatively large in size and heavy in weight, and the pressure sensing components cannot be further miniaturized, and it is difficult to form a large array of micro components, and its rigid device structure also prevents the device from being bent. It is not easy to form a "tactile" measurement condition. [0003] Organic semiconductors, especially small or...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/20
Inventor 钟高余赵清刘宇宋佳
Owner FUDAN UNIV
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