Air-float magnetic controlled precision movement platform

A precision motion and platform technology, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as mechanical friction and heat generation, and achieve the elimination of friction and wear, avoid mechanical contact, and fast response control accuracy Effect

Inactive Publication Date: 2008-04-09
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to provide an air-floating magnetic control precision motion platform, which can effectively solve the problems caused by the mechanical friction of the traditional mot

Method used

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  • Air-float magnetic controlled precision movement platform
  • Air-float magnetic controlled precision movement platform
  • Air-float magnetic controlled precision movement platform

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Embodiment Construction

[0023] Figures 1, 2 and 3 are the single mover and single stator air-floating magnetic control precision motion platform of the present invention. It is mainly used for short-stroke motion and can be used as a micro-motion stage for ultra-precise plane positioning. Figures 4, 5 and 6 are multi-mover and single-stator air-floating magnetic control precision motion platforms of the present invention. It can be used as a parallel multi-station large-stroke precision motion platform.

[0024] As shown in FIG. 1 , the single mover and single stator precision motion platform of the present invention includes a suspendable mover platform 1 and a stator platform 6 . As shown in Figure 2, there are three sets of thrust coils 3 equally distributed on the bottom of the single mover platform, and the arrangement direction of each set of thrust coils 3 points to the center of the bottom of the mover platform. The air bearing 2 of the mover platform 1 is an outer annular structure, and ai...

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PUM

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Abstract

The present invention discloses an air-floating magnetic-control precision motion platform, which comprises a mover platform, a stator platform, a mover thrusting coil, a stator magnet permanent iron array and an x-y directional reflection mirror. The x-y directional reflection mirror is positioned at two sides of the top of the mover platform. The bottom edge of the mover platform is provided with an air-floating hole. The center of the mover platform is provided with a vacuum cavity. The mover thrusting coil is positioned at the inner side of the bottom of the mover platform. The stator magnet permanent iron array is fixed on the stator platform. The entire mover platform floats above the stator platform. The way of the arrangement of the mover thrusting coil is matched with that of the stator magnet permanent iron array. By adopting the air-floating magnetic-control precision motion platform of the present invention, fretting precision and positioning precision of micrometer/nanometer can be realized by the single mover air-floating magnetic-control precision motion platform while the precision motion of multi-working station and large stroke can be realized by a plurality of the mover air-floating magnetic-control precision motion platforms. As the mover platform floats above the stator platform, the mechanical friction between the platforms and the problem of the motion precision of the platform caused by the friction are avoided, and meanwhile a mover coil can be cooled.

Description

technical field [0001] The invention relates to a precision motion control device, in particular to an air-floating magnetically controlled precision motion platform capable of precisely controlling plane motion. Background technique [0002] With the continuous development of science and technology and industrial technology, human creativity is also constantly developing to the microcosm. With the development of today's micro-processing technology, more and more bulky machines around us are replaced by small and convenient devices. However, as the size of the manufactured devices becomes smaller and smaller in the micromachining process, the precise positioning of the operating system becomes more and more important. For example, in IC chip lithography, micro-machine manufacturing, precision measurement, etc., the status of precision motion control devices is particularly prominent. Therefore, its research is more and more favored by researchers at home and abroad. [00...

Claims

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Application Information

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IPC IPC(8): G03F7/20H01L21/683
Inventor 袁志扬王天明刘育
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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