Co-Fe-Zr based alloy sputtering target material and process for production thereof
A co-fe-zr, sputtering target technology, applied in sputtering plating, metal material coating process, ion implantation plating, etc., can solve the problems of leakage magnetic flux and high target permeability
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Embodiment 1
[0060] Hereinafter, the present invention will be described in more detail with reference to examples.
[0061] In the following examples, the alloy compositions are all set to Co-27.6Fe-4Zr-4Nb (atomic %). After preparing various powders shown in Table 1 by a gas atomization method using Ar gas, the atomized powders were classified with a 60-mesh sieve. Various spray powders were weighed and mixed in the combinations shown in Table 1 so that the composition of the mixed powder was Co-27.6Fe-4Zr-4Nb (atomic %), and then filled into a mild steel container and sealed for degassing. Then, under the conditions of pressure 122MPa, temperature 950°C, and holding time 1 hour, sintered body was made by hot isostatic pressing, and then a Co-Fe-Zr alloy sputtering target with a diameter of 190mm and a thickness of 12mm was made by machining material.
[0062] Moreover, after the ingot of the same composition was produced by melt casting, the Co-Fe-Zr system alloy sputtering target mat...
Embodiment 2
[0078] In the following examples, the alloy compositions are all set to Co-27Fe-5Zr-5Ta (atomic %). A Co—Fe—Zr-based alloy sputtering target with a diameter of 190 mm and a thickness of 15 mm was prepared in the same manner as in Example 1 using various powders shown in Table 4. In addition, a Co—Fe—Zr-based alloy sputtering target with a diameter of 190 mm and a thickness of 15 mm was also produced by machining after producing an ingot of the same composition by melting and casting.
[0079] Table 4
[0080] Sample No.
[0081] As in Example 1, a test piece was taken from the end material of the target of the above-mentioned sample 11, the microstructure was observed with a scanning electron microscope, and the phase was identified by X-ray diffraction measurement. In addition, the above-mentioned microstructure observation and X-ray diffraction measurement used the same method and the same apparatus as in Example 1.
[0082] FIG. 5 shows a scanning electron micro...
Embodiment 3
[0090] In the following examples, the alloy compositions are all set to Co-36.8Fe-5Zr-3Ta (atomic %). A Co—Fe—Zr-based alloy sputtering target with a diameter of 190 mm and a thickness of 15 mm was produced in the same manner as in Example 1 using various powders shown in Table 7. In addition, a Co—Fe—Zr-based alloy sputtering target with a diameter of 190 mm and a thickness of 15 mm was also produced by machining after producing an ingot of the same composition by melting and casting.
[0091] Table 7
[0092] Sample No.
[0093] As in Example 1, a test piece was taken from the end material of the target of the above-mentioned sample 21, the microstructure was observed with a scanning electron microscope, and the phase was identified by X-ray diffraction measurement. In addition, the above-mentioned microstructure observation and X-ray diffraction measurement used the same method and the same apparatus as in Example 1.
[0094] FIG. 7 shows a scanning electron mic...
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Abstract
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