High temperature resistant high photics reflexive conductive film and preparation method thereof

Abstract

The invention relates to a conductive film with high optical reflection, which can be used in the atmosphere environmental with the temperature ranging from room temperature to 550 DEG C, and a preparation method of the conductive film. The conductive film provided by the invention comprises a basic piece, a film damping layer, a film conductive layer, a film protection layer, all of which are arranged layer by layer from bottom to top. The conductive layer is metal silver film with the thickness ranging from 150 nm to 300 nm; the lower surface of the conductive layer is the film damping layer with the thickness ranging from 10 nm to 40nm; the upper surface of the film conductive layer is a film protection layer with the thickness ranging from 5nm to 15nm. The preparation method is that plating technology is adopted; the damping layer, the conductive layer and the protection layer are sequentially plated on the basic piece layer, and finally the heat disposal is carried out by virtue of a muffle. By taking metal and metal oxide as the damping layer and the protection layer of the silver film, the invention can effectively restrict the agglomeration and coacervation of the silver film under high temperature, and implements that the prepared film can remain excellent conductive performance and high optical reflection performance under high temperature.

Description

technical field [0001] The invention relates to a conductive film and a preparation method thereof, in particular to a conductive film with high optical reflection and can be used in an atmospheric environment ranging from room temperature to 550° C. and a preparation method thereof. Background technique [0002] Films have been widely used in defense, communications, aviation, aerospace and industrial and agricultural production. Optical high-reflection films are usually used for civilian mirrors, aluminized films in parabolic solar receivers in solar cookers, coated mirrors in large-scale astronomical instruments and precision optical instruments, high-reflection films for various lasers, etc. Good conductive films (such as Al, Cu, Cr, Pt, Au, Ag films, etc.) are commonly used in semiconductor devices and integrated circuits. With the advancement of science and technology, special requirements have also been placed on the properties of thin films. For example, for GaN-bas...

AI Technical Summary

Problems solved by technology

However, the silver thin film is prone to agglomeration and agglomeration under high temperature conditions, which causes the structure of the silver thin film to be destroyed, the conduction fails, and the optical reflection performance decreases.

That is to say, pure silver films cannot achieve high optical reflection and good electrical conductivity under high temperature conditions.

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