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Membrane viscosity measurement method

A measurement method and viscosity technology, applied in the field of integrated circuit semiconductor packaging and testing, can solve the problems of high cost, complex equipment and operation, high precision, and achieve the effect of low cost and easy operation

Active Publication Date: 2008-06-04
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method requires custom-made special equipment for film attachment and tensile measurement. Therefore, the equipment and operation of this method are complex and costly, and the accuracy is high, and it is only suitable for specific laboratory conditions. For the factory environment The above methods are not suitable for the simple, fast and economical requirements

Method used

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Embodiment Construction

[0012] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0013] Measure the viscosity of UV film with adopting LINTEC system (RAD-2500 series) laminating machine as example, the concrete operating steps of the inventive method are as follows:

[0014] 1. If figure 2 As shown, use the film lamination machine made by LINTEC (RAD-2500 series), and use the fixed roller attachment pressure on the equipment to attach a fixed-size rubber belt 1 (length: 10-200cm, width: 2-15cm) to the UV film. 2's fixed position.

[0015] 2. If image 3 and Figure 4 As shown, fix the pasted film 2 on the working platform 4 of the film laminating machine with the adhesive side facing upwards. One end of the rubber belt 1 is connected to the tension gauge 3, and the tension gauge 3 is fixed on the film laminating machine in reverse. 4 same height.

[0016] 3. If Figure 5 As shown, the rubber belt 1 is peeled off fro...

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Abstract

The invention discloses a method for measuring viscosity of a membrane. The invention includes the following steps: (1) a rubber belt is pasted and attached with the membrane to be measured by using pasting pressure and attaching pressure of a fixed roller on a sticking film machine; (2) the pasted membrane to be measured is fixed adhesively faceup on a working platform of the sticking film machine, and one end of the rubber belt is connected with a tensometer which is inversely fixed on the sticking film machine; and (3) the membrane to be measured is departed from the rubber belt by a movement with uniform speed of the working platform on the sticking film machine, and numerical value in the tensometer is read and taken as the result of measurement on the viscosity of the membrane to be measured. The invention admirably adopts the inherent function of sticking membrane in the present sticking film machine and device to carry out the quantitative measurement on the viscosity of all kinds of membranes used for being pasted and attached in silicon chips like the blue membrane, the UV membrane, etc. , with the advantages of easy and fast operation and low cost. The invention provides reliable evidences for the manufacturing technology condition and quality control of the semiconductor products.

Description

technical field [0001] The invention relates to a process method for packaging and testing integrated circuit semiconductors, in particular to a film viscosity measurement method. Background technique [0002] Adhesive films are used in the semiconductor packaging industry to attach silicon wafers for further finishing. Since the viscosity of the film directly affects the product quality and subsequent processing conditions, it is necessary to quantitatively manage the viscosity of the film. At present, the industry does not have a unified standard definition for the viscosity of various films used in silicon wafer film bonding. In the current packaging factory, there are few methods for quantitative management of film viscosity, and there are few effective methods for measuring film viscosity. , generally use artificial judgment based on experience. Currently known methods such as figure 1 As shown, the film is adhered to a horizontally moving stainless steel plate (stai...

Claims

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Application Information

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IPC IPC(8): H01L21/00H01L21/66G01N19/04
Inventor 吴涵
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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