Luminous diode device structure and its manufacture method
A technology for light-emitting diodes and device structures, applied in semiconductor devices, electrical components, circuits, etc., can solve problems such as affecting the anti-static performance of devices and reducing crystal quality
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[0021] The structure of the light-emitting diode device of the present invention can be referred to as shown in the accompanying drawings, including the following layers from bottom to top: sapphire substrate 1, buffer nucleation layer 2, undoped GaN layer 3, N-type GaN layer, multiple quantum wells Layer 7, Al and Mg-doped GaN layer 8 and Mg-doped GaN layer, the N-type GaN layer is divided into a first Si-doped GaN layer 4 located below and a second Si-doped GaN layer 6 located above, A Si-doped AlGaN layer 5 is also included between the first Si-doped GaN layer 4 and the second Si-doped GaN layer 6 .
[0022] The total thickness of the first Si-doped GaN layer 4 , the Si-doped AlGaN layer 5 and the second Si-doped GaN layer 6 is 3 μm˜5 μm.
[0023] The Mg-doped GaN layer includes a Mg-doped high-temperature GaN layer 9 located below and a Mg-doped low-temperature GaN layer 10 located above.
[0024] The Mg-doped low-temperature GaN layer 10 is a roughened layer.
[0025] T...
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