Growth silicon based thin film and PECVD equipment for high-efficiency silicon based thin-film solar cell

Abstract

The invention relates to a PECVD device of solar energy batteries of grown silicon base films and highly effective silicon base films and comprises a deposited cavity body, a gas controlling system, an electro-control system and a vacuum unit; wherein, the deposited cavity body consists of a growing cavity body (1) arranged at the middle position of the deposited cavity body, and in and out plate chambers (2) arranged at two sides of the growing cavity body (1); the in and out plate chambers (2) which are provided with movable doors which can be opened and closed by hand are provided with a plurality of plates of automatic loading and unloading frames of sample plates; four groups of parallel plate capacitive electrodes used in deposition are positioned in the growing cavity body (1) and each group of parallel plate capacitive electrodes consists of two upper and lower electrode plates which are arranged symmetrically, and baffles are arranged vertically between each group of parallel plate capacitive electrodes; the vacuum unit consists of a mechanical pump (3), a condensation filter (4) and a waste air treatment device (5); a PLC controller of the electro-control system controls the growing process of silicon base films and the solar energy batteries of silicon base films; the heterogeneity of the silicon base film prepared by the invention is less than 3 percent (tested and calculated by adopting the method of infrared transmission spectrum) and the converting efficiency of the solar energy batteries of silicon base films is more than 9 percent (testing light source: AM1.5; 1000W/M<2>).

Description

technical field [0001] The invention relates to equipment for preparing silicon-based thin-film materials and silicon-based thin-film solar cells, in particular to equipment for preparing silicon-based thin-film materials and high-efficiency silicon-based thin-film solar cells by PECVD. Background technique [0002] At present, the world is facing energy shortage and environmental degradation, and the development of renewable energy has been greatly accelerated. Crystalline silicon solar cells are limited by the supply of raw materials, making silicon thin film solar cells more important. However, at present, the cost of R&D and production equipment for preparing silicon thin film solar cells is relatively high, which seriously restricts its development speed. The market urgently needs low-cost silicon thin-film battery R&D and production equipment. [0003] Chinese patent CN2404215 provides a PECVD device for making amorphous silicon thin film solar cells. Such as figur...

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Its disadvantages are: each additional isolation room will cost at least 150,000 to 200,000 yuan, and the purpose is onl

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