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Growth silicon based thin film and PECVD equipment for high-efficiency silicon based thin-film solar cell

A technology of solar cells and silicon-based thin films, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of increasing the complexity of the operation process and prolonging the growth cycle

Inactive Publication Date: 2008-07-16
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its disadvantages are: each additional isolation room will cost at least 150,000 to 200,000 yuan, and the purpose is only to reduce possible impurity pollution; 2. Extend the growth cycle; 3. Increase the complexity of the operation process

Method used

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  • Growth silicon based thin film and PECVD equipment for high-efficiency silicon based thin-film solar cell
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  • Growth silicon based thin film and PECVD equipment for high-efficiency silicon based thin-film solar cell

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0027] Such as figure 2 As shown, the present invention is composed of a deposition chamber, a gas path control system, an electric control system, and a vacuum unit. The electric control system controls the deposition chamber, the gas path control system, and the vacuum unit.

[0028] The connection between the deposition chamber and the vacuum unit is as follows: image 3 As shown; the condensation filter 4 is respectively connected with the growth chamber 1, the inlet and outlet chamber 2, the mechanical pump 3, and the exhaust gas pipeline. The mechanical pump 3 is connected with the exhaust gas treatment device 5 and the condensation filter 4 by a stainless steel bellows with a diameter of 50 mm. image 3 The leftmost mechanical pump in the middle is used for exhaust gas discharge. It is connected to the condensation filter 4 through a ...

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Abstract

The invention relates to a PECVD device of solar energy batteries of grown silicon base films and highly effective silicon base films and comprises a deposited cavity body, a gas controlling system, an electro-control system and a vacuum unit; wherein, the deposited cavity body consists of a growing cavity body (1) arranged at the middle position of the deposited cavity body, and in and out plate chambers (2) arranged at two sides of the growing cavity body (1); the in and out plate chambers (2) which are provided with movable doors which can be opened and closed by hand are provided with a plurality of plates of automatic loading and unloading frames of sample plates; four groups of parallel plate capacitive electrodes used in deposition are positioned in the growing cavity body (1) and each group of parallel plate capacitive electrodes consists of two upper and lower electrode plates which are arranged symmetrically, and baffles are arranged vertically between each group of parallel plate capacitive electrodes; the vacuum unit consists of a mechanical pump (3), a condensation filter (4) and a waste air treatment device (5); a PLC controller of the electro-control system controls the growing process of silicon base films and the solar energy batteries of silicon base films; the heterogeneity of the silicon base film prepared by the invention is less than 3 percent (tested and calculated by adopting the method of infrared transmission spectrum) and the converting efficiency of the solar energy batteries of silicon base films is more than 9 percent (testing light source: AM1.5; 1000W / M<2>).

Description

technical field [0001] The invention relates to equipment for preparing silicon-based thin-film materials and silicon-based thin-film solar cells, in particular to equipment for preparing silicon-based thin-film materials and high-efficiency silicon-based thin-film solar cells by PECVD. Background technique [0002] At present, the world is facing energy shortage and environmental degradation, and the development of renewable energy has been greatly accelerated. Crystalline silicon solar cells are limited by the supply of raw materials, making silicon thin film solar cells more important. However, at present, the cost of R&D and production equipment for preparing silicon thin film solar cells is relatively high, which seriously restricts its development speed. The market urgently needs low-cost silicon thin-film battery R&D and production equipment. [0003] Chinese patent CN2404215 provides a PECVD device for making amorphous silicon thin film solar cells. Such as figur...

Claims

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Application Information

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IPC IPC(8): C23C16/50C23C16/30C23C16/52
Inventor 刁宏伟王文静廖显伯赵雷
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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