Passive microfluid mixer and packaging method thereof

An encapsulation method and microfluidic technology, applied in fluid mixers, chemical instruments and methods, mixers, etc., can solve problems such as difficult cleaning of PDMS microfluidic chips, and achieve the effect of improving the mixing effect

Inactive Publication Date: 2008-08-13
ANHUI UNIVERSITY OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage is that once the chip is packaged, it forms a permanent bond and cannot be disassembled, which brings difficulties to the cleaning of PDMS microfluidic chips with strong hydrophobicity.

Method used

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  • Passive microfluid mixer and packaging method thereof
  • Passive microfluid mixer and packaging method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] Fabrication method of the lower PDMS layer:

[0020] See Figure 3 and Figure 5, its main process:

[0021] 1. Coating photoresist on the silicon wafer, developing, and curing to obtain a protruding columnar microstructure adhesion array pattern, and then inductively coupled plasma (ICP) etching the silicon wafer to obtain a silicon template negative pattern a;

[0022] 2. Apply thick glue such as SU8 glue on the silicon wafer, and etch to obtain the negative pattern b of the fluid channel groove;

[0023] 3. Inject PDMS, degas and penetrate into the hole under vacuum, heat and solidify c;

[0024] 4. Mechanical demoulding to obtain the lower PDMS layer.

[0025] Fabrication method of the upper PDMS layer:

[0026] See Figure 4 and Figure 6, the main process:

[0027] 1. Coating photoresist on the silicon wafer, developing, and curing to obtain a protruding columnar microstructure adhesion array pattern, and then inductively coupled plasma (ICP) etching the silicon w...

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Abstract

The present invention provides a passive microfluid mixer and its encapsulation method. The microfluid mixer is composed of an upper PDMS and a lower PDMS. The upper PDMS layer forms a complex microstructure of the microfluid channel bottom, the shape is raised microspine or recess microgroove, the layout is any shape, generally parallel spine(groove), horizontal to the flowing direction. These microstructures lead to chaotic stream of microfluid, evidently enhances the mixing effect, obtained by a step etching method. The encapsulation method is encapsuled by contacting raised column microstructure adhesion array to generate adhesive force of the upper and the lower PDMS. The shape of the raised column microstructure is polyhedron or cylinder; each column microstructure contacts with the side of one or more column microstructures of another layer by the side; the top of each column microstructure of a certain layer contacts with the bottom of another layer.

Description

technical field [0001] The invention relates to a microfluid mixer in a microfluidic system, especially a passive microfluid mixer and a packaging method thereof. Background technique [0002] Microfluidic mixing system can be used in chemical analysis, biological and chemical sensing, molecular separation, nucleic acid sequencing and analysis, environmental monitoring and other fields. Compared with traditional dynamic chemical analyzers that rely on stirring and mixing, it has light weight, fast response and It is characterized by low cost and can replace some existing fluid systems. The research on its mechanism and its devices has become a research hotspot in recent years. According to whether there is an external drive, microfluidic mixers can be divided into two types: active and passive. Active mixers mainly realize the mixing operation of samples through microreactors or external force fields. In recent years, the use of ultrasonic, piezoelectric, magnetic and othe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01F5/06B01J19/00B81B1/00B81C3/00
Inventor 单建华
Owner ANHUI UNIVERSITY OF TECHNOLOGY
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