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Three-dimensional active assembled neuro silicon micro-electrode array

An electrode array and micro-electrode technology, which is applied in medical science, sensors, diagnostic recording/measurement, etc., can solve the problem that the repeatability of mechanical and electronic characteristics is difficult to guarantee, it is difficult to achieve the ideal signal recording effect, and the economic cost and process are difficult to achieve, etc. problems, to avoid damage to the probe, facilitate processing and assembly, and reduce the difficulty of processing

Inactive Publication Date: 2008-08-27
TIANJIN UNIV
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  • Summary
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  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Most of the existing neural microelectrodes are passive single-point measurement microelectrodes. Because they are made by hand, the repeatability of mechanical and electronic characteristics is difficult to guarantee.
In addition, the structure of neural microelectrodes mostly stays in one-dimensional or two-dimensional, and this structure is difficult to achieve the ideal signal recording effect
At the same time, there is still a big gap between the produced electrode and clinical application.
Its high economic cost and technical difficulty in realization also hinder the development and application of neural microelectrodes.

Method used

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  • Three-dimensional active assembled neuro silicon micro-electrode array

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Experimental program
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Effect test

Embodiment 1

[0052] Comparing with Fig. 4-Fig. 7, this design consists of three parts: two-dimensional neural microelectrode (2 pieces), substrate (1 piece), and comb-shaped separator (2 pieces). Two two-dimensional neural microelectrodes are fixed on both sides of the "I"-shaped substrate through comb-shaped separators. The upper part of the two-dimensional electrode has two rectangular recesses of equal width, and the lower part is four probes arranged equidistantly; the substrate is in the shape of "I"; the two-dimensional electrode is a groove embedded in the substrate from the side of the substrate . The comb-shaped intervals are equal, and the depth and thickness of the comb-shaped intervals are consistent with the depth and thickness of the recessed part of the two-dimensional electrode, so that the two can be fully occluded and fixed. The probe arm of the probe of the two-dimensional electrode is integrated with four electrode measuring points at the same time. After the probe is ...

Embodiment 2

[0054] Comparing with Fig. 8-Fig. 12, this design consists of three parts: two-dimensional neural microelectrodes (2), substrate (1), and comb-shaped separator (1). The "T"-shaped protruding part of the two-dimensional neural microelectrode passes through the hole etched on the substrate, and is fixed from the back of the substrate by a comb-shaped partition. The upper part of the shape of the two-dimensional electrode is a "T" shape placed at negative ninety degrees, and the protruding part of the "T" shape has a rectangular recess, and the lower part of the two-dimensional electrode is four probes arranged equidistantly; There are two rectangular openings on the etching bed on the above-mentioned substrate, and the size of the rectangular opening is consistent with the size of the "T"-shaped protruding part of the matching two-dimensional electrode; through the rectangular hole etched through the substrate. The comb-shaped intervals are equal, and the depth and thickness of...

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Abstract

The invention relates to a three-dimensional active assembled silicon neural microelectrode array, which belongs to the technology field of bioelectric signals of human brain. The three-dimensional active assembled silicon neural microelectrode array comprises two two-dimensional silicon neural microelectrodes, a substrate and a pectinate partition, wherein the two two-dimensional microelectrodes are connected with the substrate by means of socket joint; and the pectinate partition is also connected with the two two-dimensional silicon-based neural microelectrodes by means of socket joint to fix the microelectrodes. Compared with the prior two-dimensional microelectrode array, the three-dimensional microelectrode array has the advantages that: (1) the three-dimensional active microelectrode array can obtain neural signals accurately at multiple angles with simple structure, easy assembly and low cost; (2) the substrate is not perforated by small-sized holes, thereby reducing processing difficulty while ensuring high yield; and (3) when an electrode probe is assembled with the substrate, the probe doesn't pass through the holes on the substrate, thereby avoiding damage to the probe.

Description

technical field [0001] The utility model belongs to the technical field of measuring bioelectrical signals of human brains, in particular to a three-dimensional active assembled neural silicon microelectrode array. Background technique [0002] Neural silicon microelectrodes refer to microprobes or microprobe arrays made of silicon using silicon micromachining technology. It can be used to measure the biological potential of a single neuron cell through electrochemical generation, and can electrically stimulate a single neuron cell from the outside, so as to realize the functions of recording measurement signals and providing excitation signals. Many diseases related to the central nervous system, including polio, Parkinson's syndrome, blindness, deafness, etc., cannot be cured by traditional treatment methods, and nerve stimulation is a promising therapy. Second, improving the structure and measurement equipment of recording probes has an important impact on achieving long...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/0478
Inventor 李醒飞钟莹李洪宇韩雪孙斐王盼
Owner TIANJIN UNIV
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