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Ultraviolet-resistant material, sealing member, buffer member, shading member and light source apparatus

A technology of UV resistance and light source device, which is applied in laser components, metal material coating technology, lasers, etc., and can solve the problems of difficult application of light-transmitting windows and high cost of light-transmitting windows

Inactive Publication Date: 2008-10-01
HOYA CANDEO OPTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, the above-mentioned method of manufacturing a light-shielding member by forming a coating film on a light-transmitting window needs to form a uniform aluminum film or a magnesium fluoride film on the peripheral portion of the planar light-transmitting window. The application of it is difficult, and in addition, in order to shield light and prevent oxidation, it needs to be plated twice, so there are problems related to the high cost of the light-transmitting window

Method used

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  • Ultraviolet-resistant material, sealing member, buffer member, shading member and light source apparatus
  • Ultraviolet-resistant material, sealing member, buffer member, shading member and light source apparatus
  • Ultraviolet-resistant material, sealing member, buffer member, shading member and light source apparatus

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Experimental program
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Effect test

Embodiment approach 1

[0062] First, as Embodiment 1 of the present invention, the production procedure and characteristics of an ultraviolet-resistant material formed of a clay film will be described.

[0063] 1. Form clay film

[0064] 8.0 g of natural montmorillonite, namely "Kunipiya (クニピア) P" (registered trademark) manufactured by Kunimin (クニミネ) Industry Co., Ltd., was added as clay to 240 cm 3 of distilled water.

[0065] When a uniform clay dispersion is obtained using a self-rotating and revolving mixer (ARE-250 manufactured by Shinkyo Co., Ltd.), pour the clay dispersion into a stainless steel tray with a flat bottom of 20 cm on one side. In the process, the clay particles were slowly deposited in a horizontally placed state, and after drying for 5 hours at a temperature of 150 ° C in a forced-air oven, a self-supporting mechanical structure with a thickness of about 80 microns was obtained. Sheet-shaped clay film with 20 cm on one side for strength and flexibility.

[0066] 2. Measureme...

Embodiment approach 2

[0110] Next, as Embodiment 2 of the present invention, a configuration of a light source device including an ultraviolet-resistant material formed of a clay film will be described.

[0111] Figure 4 It is a cross-sectional view showing an excimer lamp 41 as a light source device according to the present embodiment.

[0112] exist Figure 4 Among them, the excimer lamp 41 includes: a light-transmitting window 43 provided in the light emission direction; and an airtight container 44 having a plurality of excimer discharge electrodes 42 arranged to face each other.

[0113] In addition, the surface of the excimer discharge electrode 42 is covered with an insulator made of synthetic quartz glass.

[0114] Between the plurality of opposed electrodes 42, 42, a discharge space 45 is formed, and by applying a voltage from a high-frequency power source 46, the excimer discharge gas present in the discharge space 45 in the airtight container 44 generates a discharge. , excimer light...

Embodiment approach 3

[0126] Next, as Embodiment 3 of the present invention, the configuration of another light source device similar to the light source device shown in Embodiment 2 will be described.

[0127] The light source device of this embodiment differs from the light source device described in Embodiment 2 in the method of attaching the translucent window.

[0128] Figure 5 It is a sectional view for explaining the state where the light transmission window 53 is attached to the airtight container 54 in the excimer lamp 51 as the light source device of this embodiment.

[0129] In the above-mentioned Embodiment 2, only the ultraviolet-resistant material formed by the above-mentioned clay film is used to form the sealing member and the cushioning member when the light-transmitting window is installed. In this embodiment, as Figure 5 The UV-resistant material made of clay film and other parts made of organic matter are used together.

[0130] exist Figure 5 Among them, the light-shieldi...

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Abstract

The invention provides an ultraviolet-resistant material used under the environment irradiated by ultraviolet, and a sealing part, a buffering part, a lightproof part, a light source apparatus and a processing apparatus using the ultraviolet-resistant material. As gas for discharging of quasimolecule enclosed in Xe, a light inlet window (43) is mounted on a gas-tight container (44) of quasimolecule light (41) forming a discharging space(45), by means of the sealing part (48) and the buffering part (49) formed by ultraviolet-resistant material constituted by a clay membrane.

Description

technical field [0001] The present invention relates to an ultraviolet-resistant material used in an environment where ultraviolet radiation is emitted, and a sealing member, a cushioning member, a light-shielding member, a light source device, and a processing device using the ultraviolet-resistant material. Background technique [0002] Generally, as a device using ultraviolet rays, there are known light source devices that excite an inert gas filled in an airtight container to radiate ultraviolet rays or irradiate ultraviolet rays on an object to be processed disposed in an airtight container while adding a processing gas. A processing device or the like that processes the surface of the object to be processed by utilizing the reaction between the processing gas and ultraviolet rays. In these devices, in addition to the above-mentioned airtight container, a light-transmitting window made of multi-component glass, quartz glass, or crystal material that can transmit ultravi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K3/00C09K3/10H01J65/00H01S3/00
CPCC23C16/488C23C16/4409H01L21/67115
Inventor 木暮靖男
Owner HOYA CANDEO OPTRONICS