Low temperature scanning probe microscope system based on pulsatron refrigeration technology
A technology of pulse tube refrigeration and microscope system, which is applied in the direction of scanning probe microscopy, scanning probe technology, instrument parts, etc., can solve the problems of limiting the application of pulse tube refrigeration technology, reduce operating costs and save helium Gas resources, simple operation and maintenance
Active Publication Date: 2011-02-02
INST OF PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology
However, the micron-scale vibration generated by the moving airflow in the refrigerator limits the application of pulse tube refrigeration technology in vibration-sensitive fields.
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[0030] According to the vibration source and frequency characteristics of the pulse tube refrigerator, the invention adopts multi-stage active / passive vibration reduction methods such as bellows, piezoelectric ceramic tubes and springs, so that the pulse tube refrigeration technology can be applied to the scanning probe microscope system, Thereby, the operating cost of the system is greatly reduced, the operation and maintenance process of the system is simplified, and the operation of the system is no longer limited by the low temperature maintenance time.
[0031] In order to achieve effective vibration isolation, the present invention adopts a combination of two-stage passive vibration reduction and one-stage active vibration reduction. The bellows installed between the pulse tube cooling head and the main vacuum chamber of the system is the first level of passive vibration reduction to realize the overall vibration isolation of the system.
[0032] Further, the pulse tube ...
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The invention relates to a low temperature scanning probe microscope system based on pulse tube refrigeration technology. Aimed at vibration source and characteristics, a multistage active / passive damping device, including a sylphon bellowss, a piezoelectric ceramic tube and a spring, is adopted. The sylphon bellowss is used for connecting a main system cavity and a refrigeration head of the pulse tube to realize vibration isolation of the whole system. As for low frequency vibration unique to a pulse tube refrigerator, an active damping device with a piezoelectric ceramic tube and a digitalsignal processor as the core is adopted. A beryllium copper spring and a damping magnet form a first stage passive damping device to isolate vibration. The system eliminates the vibration from the pulse tube refrigerator and the refrigeration head to the scanning probe, applies to other vibration sensitive occasions that require low temperature, saves a large amount of liquid helium refrigerant, simplifies equipment operation and maintenance, and significantly prolongs the retention time at the low temperature.
Description
technical field [0001] The present invention relates to a novel cryogenic scanning probe microscope (SPM) system. By combining pulse tube refrigeration technology, the system can reach a temperature below 4K without using liquid helium refrigerant, and has obvious advantages in low temperature maintenance time compared with traditional liquid helium refrigeration methods. Background technique [0002] Scanning probe microscopy is currently the most widely used powerful tool for studying various physicochemical phenomena and effects at the nanoscale. In order to reduce electronic noise, realize atomic / molecular manipulation, and resolve splitting of fine energy levels, scanning probe microscope systems usually work in the liquid helium temperature region or lower. The traditional refrigeration method not only has a limited time for keeping low temperature, but also consumes a large amount of expensive liquid helium refrigerant, which makes the operation and maintenance costs...
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IPC IPC(8): G01Q60/00
Inventor 高鸿钧郇庆
Owner INST OF PHYSICS - CHINESE ACAD OF SCI