Self-decoupling high-sensitivity resonance silicon micro mechanical gyroscope

Abstract

A self-decoupling high-sensitivity resonant silicon micromechanical gyroscope mainly comprises an outer mass block, an inner mass block, a cantilever beam, a lever amplification mechanism, a DETF(double-ended tuning fork), a driving electrode, a detecting electrode, wherein the lever amplification mechanism, the fork, the driving electrode and the detecting electrode are arranged in the inner mass block. The structure of the micromechanical gyroscope is axially symmetric, and the inner and outer mass blocks are in Chinese character 'hui' shape, which is capable of making the component implement larger mass block in limited volume. The outer mass block and the inner mass block are separated by a folding beam for reducing effectively the coupling; a resonant beam is in the form of DETF, and both ends of the resonant beam are connected with the periphery through a fine neck structure, thereby reducing effectively the energy coupling of the resonant beam and the peripheral structure; two forks are arranged symmetrically for implementing difference output of resonant frequency, thereby reducing effectively the common-mode interference. The structural form of the invention improves sensitivity and resolution of the accelerometer, and reduces the coupling of the driving direction vibration to the detecting direction by using framework structure.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems, and is a novel micro-mechanical gyroscope. Background technique [0002] The development of Microelectromechanical System (MEMS for short) technology and the gradual maturity of processing technology have made it possible to develop MEMS sensors with low cost, light weight, small size and low power consumption, and it has also become the trend of future sensor research. . [0003] Gyro is a sensor widely used in aviation, aerospace and other fields to test angular velocity. In many fields, especially aerospace and other fields that have very strict requirements on the quality and volume of devices, the development of MEMS angular velocity sensors has become inevitable. Among the many kinds of MEMS gyroscopes, the resonant silicon micromachined angular velocity sensor has become a research hotspot at home and abroad because of its quasi-digital output, low external inter...

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Problems solved by technology

Although the above-mentioned sensors have realized signal detection at present, their existing problems are low precision and high process requirements. According to the current level of MEMS processing technology in my country, it is difficult to process similar sensors.

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