Optical storage medium and method of producing optical storage medium
A technology for recording media and manufacturing methods, applied in the fields of optical record carrier manufacturing, optical record carrier, recording/reproducing by optical methods, etc., can solve problems such as deterioration of average SER, inability to fully ensure long-term reliability, etc., and improve long-term reliability sexual effect
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Embodiment 1
[0054] Each film described later was formed on a substrate 1 made of polycarbonate having a diameter of 120 mm and a plate thickness of 1.1 mm. Grooves are formed on the substrate 1 so that the track pitch is 0.32 μm. The groove depth is 25 nm, and the width ratio of the groove and the land (Groove and Land) is about 50:50.
[0055] First, degas the vacuum container to 3 x 10 -4 After Pa, at 2×10-1 The reflective film 2 having a thickness of 80 nm was formed by magnetron sputtering using an Ag—Pd—Cu alloy target under an Ar gas atmosphere of Pa. Next, in Ar gas and N 2 A GeCrN film with a thickness of 2nm was formed as the interface film 3 by using a GeCr alloy target in a mixed atmosphere of gas, and then a 20mol% SiO 2 A ZnS target was used to form the first dielectric film 4 with a thickness of 20 nm.
[0056] In addition, in Ar gas and N 2 A GeBiN recording film 5 was formed with a thickness of 25 nm using a GeBi (element ratio 50:50) alloy target in a mixed atmospher...
Embodiment 2
[0062] In addition to changing the material of the moisture-proof film 7 to add 20mol% W 2 o 5 In 2 o 3 Except for the target, the optical information recording medium 100 of Example 2 was produced in the same manner as in Example 1. confirmed the addition of 20mol% W 2 o 5 In 2 o 3 The sputtered film is also amorphous. The average SER was measured in the same manner as in Example 1, and as a result, as shown in Table 1, the average SER obtained was 9.1×10 -5 good results. In addition, IWO in Table 1 means indium tungsten oxide.
Embodiment 3
[0064] In addition to changing the material of the moisture-proof film 7 to add 20mol% CeO 2 (Cerium Oxide) In 2 o 3 Except for the target, the optical information recording medium 100 of Example 3 was produced in the same manner as in Example 1. The addition of 20mol% CeO was confirmed 2 In 2 o 3 The sputtered film is also amorphous. As shown in Table 1, an average SER of 6.8×10 was obtained -5 good results. In addition, ICO in Table 1 means indium cerium oxide.
[0065] In the above Examples 1 to 3, by using In 2 o 3 The moisture-proof film 7 is formed by sputtering the target, but it is also possible to use In which is a mixture of two or three of tin oxide, tungsten oxide, and cerium oxide. 2 o 3 target.
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