Magnetroresistive element, method of manufacturing the same, and magnetic multilayered film manufacturing apparatus
A magneto-resistance element and a manufacturing method technology, applied in the field of magneto-resistance elements, can solve problems such as reducing the MR ratio, and achieve the effect of high thermal stability
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[0082] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. Note that the constituent elements described in the embodiments are merely examples. The technical scope of the present invention is determined by the scope of the claims and is not limited by the following individual embodiments.
[0083] FIG. 1 is a cross-sectional view of a tunnel magnetoresistive element according to a first embodiment of the present invention.
[0084] By sequentially stacking the lower electrode layer 11, the antiferromagnetic layer 12, the first ferromagnetic pinned layer (first magnetization pinned layer) 13, the first nonmagnetic intermediate layer 14, and the second ferromagnetic pinned layer (second magnetization pinned layer) 15. The second non-magnetic intermediate layer (tunnel barrier layer) 16, the ferromagnetic free layer (magnetization free layer) 17 and the upper electrode layer 18 form the tunnel magnetoresisti...
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