Polysilicon film preparation with controllable crystal particle dimension and detection device

Abstract

The invention discloses a preparation for a polysilicon thin film with controllable grain size and a detection device thereof, which is characterized in that the invention consists of laser source, an optical splitter, a beam plastic system, a polysilicon thin film substrate, an optical focusing system, a stimulated Raman spectrum receiving system, a Raman data analyzing and feedback system and amovable worktable. The invention has the advantages that an online detection can be carried out simultaneously when the polysilicon thin film is prepared, thus providing the optimal energy density for the preparation of the polysilicon thin film; the detection is a non-destructive testing; the testing cost is low; the detection is fast; moreover, the device can accurately detect the granularity of the polysilicon thin film, promote the excellent rate and improve the capacity. The preparation for the polysilicon thin film and the detection device are applicable to the preparation and real timedetection of industrialized polysilicon thin film; the size of the grain can be accurately detected; the energy density of the laser can be monitored in real time.

Description

technical field [0001] The present invention relates to polysilicon, especially a preparation and detection device of a polysilicon thin film with controllable grain size, which is used to quickly and real-time detect the grain size of polysilicon thin film crystal grains, thereby adjusting the optimal energy density required for laser crystallization . Background technique [0002] As the core process of low temperature polysilicon (LTPS) technology, laser crystallization has a good application prospect in the field of liquid crystal display (LCD). The principle of laser crystallization is to use a laser to scan the low-temperature deposited amorphous silicon film to melt it and recrystallize it into a polysilicon film. Compared with the currently used amorphous silicon thin-film liquid crystal panels, polysilicon thin-film liquid crystal panels are cheaper and have higher resolution, because the transmission speed of electrons in polysilicon is faster and the quality is b...

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Problems solved by technology

However, because this detection method is destructive to the film, and it is costly and time-consuming, it is mainly used in scientific research experiments and is not suitable for industrial use.

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