Magnetron sputtering rose gold target material and preparation method thereof
A technology of magnetron sputtering and rose gold, which is applied in the field of metallurgy, can solve problems such as environmental pollution, easy-to-oxidize surface wear resistance, etc., and achieve the effects of eliminating environmental pollution, good anti-oxidation performance, and stable products
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Embodiment 1
[0013] Heat copper and cobalt to melt, then add yttrium, zinc, antimony and indium to the melted copper and cobalt in turn, stir evenly after all the materials are melted, and then refine at 1400-1450℃ for 3 minutes, after refining, put The molten alloy is poured into the casting mold, cooled naturally to room temperature, the alloy ingot is taken out, and the intermediate alloy material is obtained through conventional milling, rolling and shearing operations. The amount of each metal added is 94.5wt% of copper, 0.03wt% of yttrium, 2.764wt% of zinc, 0.003wt% of cobalt, 0.003wt% of antimony and 2.7wt% of indium.
[0014] Heat and melt the gold, then add the prepared master alloy material to the melted gold, the amount added is based on the gold accounting for 65wt% of the whole material, stir evenly after all the materials are melted, and then refine at 1200-1300°C for 5 minutes After the refining is completed, pour the molten alloy into the casting mold, cool it to room tempe...
Embodiment 2
[0017] Heat copper and cobalt to melt, then add yttrium, zinc, antimony and indium to the melted copper and cobalt in turn, stir evenly after all the materials are melted, and then refine at 1400-1450℃ for 3 minutes, after refining, put The molten alloy is poured into the casting mold, cooled naturally to room temperature, the alloy ingot is taken out, and the intermediate alloy material is obtained through conventional milling, rolling and shearing operations. The amount of each metal added is copper 72.8wt%, yttrium 4.5wt%, zinc 9.1wt%, cobalt 4.5wt%, antimony 0.91wt%, indium 8.19wt%.
[0018] Heat and melt the gold, then add the prepared master alloy material to the melted gold, the amount added is based on the gold accounting for 78wt% of the whole material, stir evenly after all the materials are melted, and then refine at 1200-1300°C for 5 minutes After refining, the molten alloy is poured into the mold, cooled to room temperature with water, and the alloy ingot is taken...
Embodiment 3
[0020] Heat copper and cobalt to melt, then add yttrium, zinc, antimony and indium to the melted copper and cobalt in turn, stir evenly after all the materials are melted, and then refine at 1400-1450℃ for 3 minutes, after refining, put The molten alloy is poured into the casting mold, cooled naturally to room temperature, the alloy ingot is taken out, and the intermediate alloy material is obtained through conventional milling, rolling and shearing operations. The amount of each metal added is 46.7wt% of copper, 12.5wt% of yttrium, 22wt% of zinc, 3.8wt% of cobalt, 0.3wt% of antimony and 14.7wt% of indium.
[0021] Heat and melt the gold, then add the prepared master alloy material to the melted gold, the amount added is 68wt% of the total material, stir evenly after all the materials are melted, and then refine at 1200-1300°C for 5 minutes After the refining is completed, the molten alloy is poured into the mold, cooled to room temperature with water, and the alloy ingot is t...
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