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Co(x)C(1-x)/Co/Si multilayered structure granule film material having room temperature low field large magnetic resistance effect

A technology of giant magnetoresistance and multilayer structure, which is applied in the field of C1-xCox/Co/Si multilayer structure granular film materials, can solve the problems of relatively harsh preparation process requirements, large-scale preparation limitations, complex structures, etc., and achieve high preparation efficiency , strong controllability and simple method

Inactive Publication Date: 2009-02-04
TSINGHUA UNIV
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Problems solved by technology

However, the structure of these materials is relatively complex, and the requirements for the preparation process are relatively strict, so their mass production is limited.

Method used

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  • Co(x)C(1-x)/Co/Si multilayered structure granule film material having room temperature low field large magnetic resistance effect
  • Co(x)C(1-x)/Co/Si multilayered structure granule film material having room temperature low field large magnetic resistance effect

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Embodiment Construction

[0013] The invention is a kind of Co with room temperature and low field giant magnetoresistance effect prepared by laser pulse deposition method x C 1-x / Co / Si multilayer structure granular film material. The specific preparation method is as follows: first put the treated Si substrate and target with a lattice orientation of 100 into the vacuum coating chamber of the PLD equipment, and use a mechanical pump and a molecular pump to vacuum the back of the coating chamber to 5×10 -4 After Pa, heat the substrate to T=300K, and then use the KrF laser (LambdaPhysics LPX205, 248nm, 25ns FWHM) to bombard the Co target with a pulse of energy of 250-300mJ, and start the motor to rotate the target and the substrate at the same time, Start to deposit the Co layer film; then change the substrate temperature to T=300K, and deposit Co in the same way x C 1-x layer of granular film. After the deposition, the sample was cooled slowly and then cooled naturally to room temperature. Other ...

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Abstract

The invention discloses a CoxC1-x / Co / Si multilayer granule membrane material with giant magneto resistance effect in a magnetic field under room temperature, belonging to magnetic quantity sensor material. A Co layer and a CoxC1-x layer are sequentially deposited on an n-Si substrate at lattice orientation 100 through laser pulse. The positive colossal magnetoresistance effect of the material under room temperature with external magnetic filed of 0.01T can reach +20.6%. With the advantages of low price and excellent performance, the material is good material for a magnetic sensor.

Description

technical field [0001] The invention belongs to the field of magnetic quantity sensor materials in information sensing materials, in particular to a C 1-x co x / Co / Si multilayer structure granular film material. technical background [0002] There have been many reports on multilayer film materials with giant magnetoresistance effect, such as in Inomata K, Tezuka N, Okamura S, Kurebayashi H, Hirohata A, Journal of applied physics, 2004, 95(11): 7234-7236. Reported Co 2 Cr 1-x Fe x Al(100nm) / AlO x (1.4nm) / CoFe(3nm) / NiFe(5nm) / IrMn(15nm) / Ta(10nm) multilayer film. The multilayer film is prepared under relatively high vacuum conditions by magnetron sputtering. Its room temperature giant magnetoresistance effect reaches -19%; In LucinskiT, Hutten A, Bruckl H, Heitmann S, Hempel T, Reiss, G.Journal of Magnetismand Magnetic Materials.2004, 269 (1): 78-88. Ni 80 Fe 20 / Co1 / CuAgAu / Co2 multilayer film, the multilayer film is made by magnetron sputtering at 1.5×10 -3 Prepared ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L43/08H01L43/10H01L43/12H01F10/32H01F41/14H01F41/20G01R33/09C23C14/28C23C14/06H10N50/10H10N50/01
Inventor 章晓中谈国太张歆吴利华万蔡华
Owner TSINGHUA UNIV
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