Patents
Literature
Hiro is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Hiro

81results about "Evaporation application" patented technology

Coating Method and Apparatus, a Permanent Magnet, and Manufacturing Method Thereof

A film is formed at a high rate on the surface of an iron-boron-rare-earth-metal magnet having a given shape, while effectively using dysprosium or terbium as a film-forming material. Thus, productivity is improved and a permanent magnet can be produced at low cost. A permanent magnet is produced through a film formation step in which a film of dysprosium is formed on the surface of an iron-boron-rare-earth-metal magnet of a given shape and a diffusion step in which the magnet coated is subjected to a heat treatment at a given temperature to cause the dysprosium deposited on the surface to diffuse into the grain boundary phase of the magnet. The film formation step comprises: a first step in which a treating chamber where this film formation is performed is heated to vaporize dysprosium which has been disposed in this treating chamber and thereby form a dysprosium vapor atmosphere having a given vapor pressure in the treating chamber; and a second step in which a magnet kept at a temperature lower than the internal temperature of the treating chamber is introduced into this treating chamber and the dysprosium is selectively deposited on the magnet surface based on a temperature difference between the treating chamber and the magnet until the magnet temperature reaches a given value.
Owner:ULVAC INC

Coating method and apparatus, a permanent magnet, and manufacturing method thereof

The object of the present invention is to improve the productivity of a permanent magnet and to manufacture it at a low cost by effectively coating Dy and Tb on a surface of the magnet of Fe—B-rare earth elements having a predetermined configuration. The permanent magnet of the present invention is manufactured by a coating step for coating Dy on the surface of the magnet of Fe—B-rare earth elements having a predetermined configuration and a diffusing step for diffusing Dy coated on the surface of the magnet into crystal grain boundary phases of the magnet with being heat treated at a predetermined temperature. In this case, the coating step comprises a first step for heating a process chamber used for carrying out the coating step and generating metallic vapor atmosphere within the process chamber by vaporizing vaporizable metallic material previously arranged within the process chamber, and a second step for introducing into the process chamber the magnet held at a temperature lower than that within the process chamber and then selectively depositing the vaporizable metallic material on a surface of the magnet by an effect of temperature difference between the temperature within the process chamber and that of the magnet by the magnet reaches a predetermined temperature.
Owner:ULVAC INC

Preparation method of multi-ferric heterojunction thin film

InactiveCN108022750ARealize electromagnetismMagnetization state changeNanostructure applicationCathode sputtering applicationHeterojunctionFerroelectric thin films
A preparation method of a multi-ferric heterojunction thin film is characterized by comprising the steps of 1) combining a ferromagnetic thin film on a stable-structure ferroelectric thin film substrate by methods such as pulse laser deposition, magnetron sputtering or molecular beam epitaxy during preparation of the thin film to obtain a ferromagnetic/ferroelectric heterojunction thin film, wherein the ferroelectric thin film substrate is one or PMN-PT, BFO, PZT, BTO, PTO and PZN-PT, and the ferromagnetic thin film is one of Fe, Co, Ni, CoFe, CoFeB, FeNi, FeSi, FeSiAl and FeAl; and 2) placingthe ferromagnetic/ferroelectric heterojunction thin film prepared in the step 1) in a heat treatment furnace by interface control, introducing a nitrogen-containing gas at a constant rate, performingnitrogen impregnation processing for 0.5-48 hours under a temperature of 150-600 DEG C, reducing a temperature, cooling with the furnace to a room temperature, and taking out a sample, wherein the stable-structure ferroelectric thin film is not affected during the heat treatment process, nitrogen atoms can be impregnated into the ferromagnetic thin film to generate a gap solid solution or a new phase, cause lattice expansion and generate stress at an interface, and the nitrogen-containing gas is one of nitrogen, ammonia, nitrogen and hydrogen and ammonia and hydrogen.
Owner:CHINA JILIANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products