Atmosphere plasma cylindrical microwave excitation cavity

Abstract

The invention belongs to the field of microwave plasma excitation technique and relates to an excitation chamber without an igniter or ignitor under atmosphere pressure. The excitation chamber comprises a cylindrical resonator which works under a TM<010> mode, an input waveguide and a flange; the cylindrical resonator consists of a cylinder (1), a chamber top cover (2) and a chamber bottom cover (3); the side wall of the cylinder (1) is opened with a micro-wave coupling window (9); a metal cylinder (4) is arranged above the central round hole of the chamber top cover (2); a coaxial external conductor (5) is arranged below the central round hole of the chamber bottom cover (3); the bottom of the coaxial external conductor (5) is provided with a short circuit board which is provided with holes at the center while the bottom of the side wall is provided with a tangent air inlet (7); and the coaxial external conductor (5) is internally provided with a coaxial hollow internal conductor (6) by the central holes. The excitation chamber has low microwave consumption and high conversion efficiency, can excite the atmosphere plasma torch in the chamber without the need of igniters or ignitors under smaller micro-wave powers and can be used for various microwave industries, more specially as the boiler igniter.

Description

technical field

[0001] The invention belongs to the technical field of microwave plasma excitation, and in particular relates to the design and use of an excitation cavity without an igniter or an ignition pole under atmospheric pressure or higher than atmospheric pressure. Background technique

[0002] Microwave plasma is a quasi-equilibrium low-temperature plasma with high electron density and temperature of non-polar discharge. Compared with DC and RF plasma, it has many advantages and particularities. Therefore, it has been widely used in the past ten years. Applications, especially in microelectronics technology, preparation and synthesis of new materials, aerospace technology, chemical industry, waste treatment, metal refining, packaging materials and pharmaceutical industry, thin film deposition, plasma polymerization, microcircuit manufacturing to welding, tool hardening, Synthesis of ultrafine powder, plasma spraying, plasma metallurgy, plasma chemical industry. Th...

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