MEMS microwave standing wave meter based on thermoelectric and capacitive dual-channel online detection

Abstract

The invention discloses an MEMS microwave standing wave meter based on thermoelectric and capacitive dual-channel online detection, which is characterized in that signal lines of an ACPS transmissionline are symmetrically placed at two ends of a main transmission line to serve as auxiliary transmission lines so as to form a symmetrical directional coupler; the symmetrical directional coupler extracts incident microwave power and reflected microwave power to the coupling end and the isolation end of an upper branch and a lower branch respectively; a thermoelectric MEMS microwave power sensor and a capacitive MEMS microwave power sensor are placed on the upper branch and the lower branch respectively, the microwave power of the coupling end and the isolation end of the upper branch and thelower branch is measured, and then the standing-wave ratio is obtained. The thermoelectric MEMS microwave power sensor is suitable for measuring small microwave power, and the capacitive MEMS microwave power sensor is suitable for measuring large microwave power, so that a larger measurement dynamic range of the microwave standing wave meter can be obtained by adopting the two sensors to perform measurement at the same time. The MEMS microwave standing wave meter has the characteristics of low loss, small chip area and compatibility with a gallium arsenide monolithic microwave integrated circuit process.

Description

technical field [0001] The present invention relates to a MEMS microwave standing wave meter based on thermoelectric and capacitive dual-channel on-line detection, in particular to a thermoelectric and capacitive dual-channel on-line detection based on MEMS (Micro-Electro-Mechanical-System, Micro-Electro-Mechanical-System) technology MEMS microwave standing wave meter and its preparation method. Background technique [0002] In the modern microwave high-density integrated radar system, the microwave standing wave meter is the key component of the microwave system module to detect the working state, and it is used to characterize the standing wave ratio of the radar system. Microwave high-density integrated radar systems require modules such as antennas and TR components to be highly integrated for micro-reconnaissance, anti-jamming, and frequency detection. As the size of the radar system becomes smaller and the degree of integration is higher and higher, the performance of...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that the existing microwave standing wave meter measures the microwave power with a small dynamic range. The present invention provides a miniaturization, low power consumption, integration, low cost, wide dynamic range and online detection standing wave ratio The MEMS microwave standing wave meter can be used to measure the standing wave ratio of microwave power in a wider range, and the preparation method of the MEMS microwave standing wave meter based on pyroelectric and capacitive dual-channel on-line detection is given at the same time

Images