Vacuum coating machine baffle with adjustable deposition rate

Abstract

A vacuum coating machine baffle with adjustable deposition rate comprises a high-temperature resistant circular plate, a rotating shaft which is vertically connected at the center of the circular plate and a driving device connected at the lower end of the rotating shaft. The baffle is characterized in that the circular plate is divided into a plurality of sectors from the center of the circular plate in a radiant way, and the sectors are sequentially a full blocking area, a non-blocking area and more than one blocking areas which has the blocking degree changing from small to large and covers until the full blocking area; the non-blocking area is formed by excavating panels of the sectors, the full blocking area is formed by completely maintaining the panels of the sectors, and the sectors of the blocking area are respectively provided with a plurality of through holes that have the apertures from large to small and the densities from dense to loose, while the apertures of the through holes in the same sector are the same as each other and have even density; the sectors completely cover a coating material evaporation source. The vacuum coating machine baffle can effectively regulate the deposition rate of the film in a multistep way under the condition of not changing the evaporation method and the evaporation rate of the coating materials, thus achieving the aim of improving the performance of film deposition.

Description

technical field [0001] The invention relates to a process for preparing thin films by thermal evaporation, in particular to a vacuum coating machine baffle plate with adjustable deposition rate in the thermal evaporation process. Background technique [0002] The vacuum thermal evaporation coating process includes a variety of process control methods such as deposition rate, vacuum degree, and substrate temperature. The deposition rate control mainly determines the aggregation density and thickness uniformity of the optical thin film, and has a direct impact on the control of the film thickness. Different deposition rates can produce significant differences in the spectral and mechanical properties of the films. Under different evaporation methods, the deposition rate of the same coating material may be very different; the same evaporation method, the most suitable deposition rate of different coating materials is also different. The vacuum evaporation coating machine mainl...

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Problems solved by technology

Generally, when encountering the above problems, it is usually avoided by changing the evaporation method or relying on the experience and

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