Volume segmentation type liquid pouring and sealing method based on silicone base subfebrile temperature pipe

Abstract

The invention discloses a cubage segmentation-typed liquid-injection and a sealing method for a silicon-based micro-heat pipe. By twice precise cubage segmentation to an enclosed space consisting of the silicon-based micro-heat pipe and an injector, little working liquid is taken out of the working liquid and the air in the sealing space; furthermore, two fine metal pipes used for connecting the liquid injection holes are sealed so as to retain the liquid in the micro-heat pipe, thus precisely controlling the charge liquid proportion of the micro-heat pipe. As the whole process is carried out in an enclosed small space, the liquid is isolated from the environmental air during the whole operation process, thus ensuring the working efficiency of the micro-heat pipe. The method avoids the step of vacuuming, and only requires two injectors and a heating device for the operation; the usage amount of the silicone sealant and the working liquid is small; the control method is simple, requiring only the heating temperature and the calibration of the injector to be adjusted; and the sealing is safe.

Description

technical field [0001] The invention relates to liquid injection ratio control and sealing of silicon-based micro-heat pipes, and relates to a volume-divided liquid injection and sealing method for silicon-based micro-heat pipes. Background technique [0002] With the continuous improvement of chip integration, more and more attention has been paid to the heat dissipation problem under micro-scale conditions. Since the micro heat pipe has the function of uniformly distributing heat on the surface of the chip, a lot of research work has been done on it. In 1984, Cotter first proposed the concept of micro heat pipes. And pointed out that the micro heat pipe is actually a hollow straight pipe. The width of the pipe is 10-500μm, and the length is 10-20mm. The liquid in the pipe is driven by the capillary force of the V-shaped groove to circulate. After that, the researchers conducted in-depth research on the operating mechanism of the micro heat pipe. [0003] The processing...

AI Technical Summary

Problems solved by technology

The connection between the liquid injection hole of the micro heat pipe and the syringe is sealed with vacuum grease. It is difficult to ensure that the working liquid will not be polluted by the outside air during the liquid injection process, and the accuracy is even more difficult to control.

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