Control method for electron beam punching machine acceleration high-voltage power supply and power supply device

Abstract

The invention discloses a control method of an accelerating high-voltage power for an electron-beam punching machine and a power device thereof. The power is supplied by three-phase commercial electricity and adopts the current conversion mode of AC-DC-AC-DC, wherein, the middle inverter link of DC-AC is high-frequency inversion and the pulse-width modulation voltage regulation function can be realized in the inversion process; a dual closed-loop control mode is adopted to realize the stable regulation of the output high-voltage; an inverter consists of at least two inverter bridges, the phase difference of the output wave of each inverter bridge is distributed symmetrically, and the output wave has the same width. The power device comprises: a power network filter, an input rectifier filter circuit, the inverter, a high-frequency and high-voltage transformer, a high-voltage rectifier filter circuit, a high-voltage discharge choke circuit, a high-voltage sampling circuit, an electronic beam sampling resistor, an inverter input current detection circuit, a dual-loop control unit, an inverter drive circuit, a fault discrimination circuit and the like. The control method and the power device are characterized by the control system with high regulation speed, strong immunity, small accelerating high-voltage power ripple, high efficiency and small size and the like.

Description

technical field [0001] The invention relates to electron beam drilling equipment, in particular to a control method and a power supply device for accelerating a high-voltage power supply for an electron beam drilling machine. Background technique [0002] The electron beam drilling process is based on bombarding the workpiece with a high energy density electron beam, causing it to melt and vaporize locally. The generated gas capillary is easily penetrated by the electron beam, and the electron beam passes through the surface of the workpiece to bombard the material of the next layer. This explosive gasification will discharge the molten material around the formed capillary, thereby processing a tolerance of Accuracy of ±5% average aperture. Compared with other processes (EDM, ECM), the workpiece and the electron beam can move freely independently during the electron beam drilling process, which makes the drilling frequency much higher than other processes. The electron bea...

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Problems solved by technology

The disadvantage is that the control system has a large inertia and the adjustment speed is slow

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