Gas sensor and temperature compensation method based on Pt reaction electrode

Abstract

The invention discloses a solid electrolyte gas sensor and a temperature compensation method based on a Pt reaction electrode. The sensor comprises a Pt reaction electrode and a solid electrolyte wafer, wherein one end face of the solid electrolyte wafer is connected with a reference electrode with a third lead. The sensor is characterized in that the Pt reaction electrode is prepared on the other end face of the solid electrolyte wafer by adopting an MEMS process, the Pt reaction electrode adopts a band structure, two ends of the Pt reaction electrode are respectively arranged on opposite edges of the end faces of the solid electrolyte wafer, which pass through the diameter direction, and are respectively connected with a first lead and a second lead; and the band electrode is tortuously distributed along the plane of the end faces of the solid electrolyte wafer. A resistor signal converting circuit is connected between the first lead and the second lead and converts the resistance value change of the Pt reaction electrode caused by the temperature change into electrical signals to be input a signal processing circuit, and electromotive force signals obtained by primary detection through the signal processing circuit and reflecting the gas volume percent are compensated so that the influence of the temperature change to the sensor property is eliminated.

Description

Technical field [0001] The invention relates to a solid electrolyte gas sensor based on a Pt reaction electrode and a temperature compensation method. Background technique [0002] Solid electrolytes are widely used in gas sensors due to their good ion conductivity. Since Faraday first discovered PbF in 1834 2 Since the law of electrical conductivity changes with temperature, many research groups at home and abroad have begun to devote themselves to research in this area. Among many solid electrolytes, lanthanum fluoride (LaF 3 ) It has high electrical conductivity at room temperature and is an ideal room temperature solid electrolyte. It has been used in SO 2 , O 2 , F 2 Waiting for the research of room temperature gas sensor. Thanks LaF 3 It has the advantage of high conductivity at room temperature, avoiding ZrO 2 , CaF 2 , Sulfate and other solid electrolyte gas sensors require heating defects, which can greatly simplify the structure of the sensor, extend the service life of...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to improve the background technology based on L aF 3 In order to provide a solid electrolyte gas sensor based on a Pt reaction electrode and a temperature compensation method for the disadvantage that the solid electrolyte gas sensor is easily affected by temperature

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