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Integrated temperature thin film pressure sensor

A thin-film pressure and sensor technology, which is applied in the field of thin-film pressure sensors and thin-film pressure sensors with integrated temperature measurement functions, can solve problems such as inability to perform relatively accurate compensation, simplify installation and debugging, improve measurement accuracy, and improve dynamic response speed Effect

Inactive Publication Date: 2009-10-28
SHAANXI ELECTRICAL APPLIANCE RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the compensation resistor is not on the diaphragm, there is a certain temperature gradient between the compensation resistor and the strain resistor, so that more accurate compensation cannot be performed

Method used

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Embodiment Construction

[0029] The content of the present invention will be further described below in conjunction with the accompanying drawings, but the specific implementation forms of the present invention are not limited to the following embodiments.

[0030] Referring to accompanying drawing, the structure of the membrane pressure sensor of integrated temperature of the present invention is as follows figure 1 As shown, it consists of a pressure introduction connecting pipe 1 with threads and a sealing ring, a sensitive component 2, an external circuit board 3, a housing 4 and a connector 5.

[0031] The structure of the sensitive component 2 in the thin film pressure sensor is as follows figure 2 As shown, it has a hollow sensitive elastic body 21 made of stainless steel 17-4PH material whose lower part is welded on the pressure connecting pipe 1. The upper bottom surface of the sensitive elastic body 21 is a strain deformation zone. A transition layer 22 , an insulating layer 23 , a resista...

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Abstract

The invention relates to an integrated temperature thin film pressure sensor, which consists of a suction pressure connecting pipe with threads and a seal ring, a sensitive component, an external circuit board, a shell and a socket connector. A sensitive elastomer is provided with a transition layer, an insulating layer, resistive layers (including a strain resistive layer and a temperature sensitive resistive layer), a welding layer and a passivation protective layer, wherein the resistive layers are connected with the external circuit board through conducting wires. The insulating layer of the sensor is formed by superimposing SiO2 and Ta2O5 or superimposing the SiO2 and Al2O3, the strain resistive layer is formed by photoetching a NiCr alloy layer, the temperature sensitive layer is formed by photoetching Ni metal, and the temperature sensitive layer not only can solve the problem of actual temperature measurement, but also can compensate the temperature sensitivity more precisely so that the pressure measurement is more accurate. The integrated temperature thin film pressure sensor adopts an ion beam sputtering process, thus the long-term stability of the sensor is good, the temperature zero drift is minimum and the comprehensive precision is high.

Description

technical field [0001] The content of the present invention belongs to the technical field of measuring instruments and equipment, and relates to a thin-film pressure sensor, especially a thin-film pressure sensor with an integrated temperature measurement function. Background technique [0002] At present, the role of sensor technology in military, civilian and other fields has been paid more and more attention by countries all over the world, and the demand is also increasing year by year. Taking the United States as an example, the average annual growth rate of the five main sensors used to measure temperature, pressure and other parameters in the military is 12%, accounting for about 15% of the total sensor market. [0003] Among the known products, the sensors used to measure temperature and pressure are the two most widely used sensors, because the temperature and pressure of the medium need to be measured and controlled in aerospace, aviation, missiles, various weapon...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/04G01K7/16
Inventor 盖广洪戚龙黎明诚
Owner SHAANXI ELECTRICAL APPLIANCE RES INST
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