Preparation method of high-purity ultrafine spherical quartz powder

A spherical quartz powder, high-purity technology, applied in the direction of silicon oxide, etc., to achieve the effect of simple process flow, simple equipment, and large-scale industrial production

Inactive Publication Date: 2011-08-24
CHINA UNIV OF GEOSCIENCES (WUHAN)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The spheroidization rate of spherical quartz powder prepared by chemical methods can be close to 100%, and the amorphous rate can also reach 100%, but the surface of the prepared spherical silica powder particles is not smooth enough, the bulk density is low, and the fluidity is poor, so it can be used as an encapsulation filler. low fill

Method used

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  • Preparation method of high-purity ultrafine spherical quartz powder
  • Preparation method of high-purity ultrafine spherical quartz powder
  • Preparation method of high-purity ultrafine spherical quartz powder

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] SiO 2 Angular quartz powder with a content of 99.92% and a median particle size of 5 μm is used as raw material, liquefied petroleum gas (LPG) is used as fuel gas, oxygen is used as supporting gas, and oxygen is used as carrier gas for powder delivery. After adjusting the pressure and flow rate of oxygen and LPG, it is ignited and spheroidized The furnace is preheated (generally, the preheating temperature is not lower than 1500°C) for 50 minutes, and the powder feeding rate is 300g / min. Analysis of SiO in products by gravimetric method 2 content, laser particle size analyzer test particle size and SEM and XRD analysis of the product, SiO in the obtained spherical quartz powder 2 The content is 99.84%, the median particle size is 2.2μm, the spheroidization rate is 99%, and the amorphous rate is 99%.

Embodiment 2

[0038] SiO 2 Angular quartz powder with a content of 99.96% and a median particle size of 10 μm is used as raw material, acetylene is used as gas, oxygen is used as supporting gas, and oxygen is used as carrier gas for powder delivery. After adjusting the pressure and flow rate of oxygen and acetylene, ignite, and preheat the spheroidizing furnace for 50 minutes , The powder feeding rate is 50g / min. Analyze by the method identical with embodiment 1, obtain SiO 2 Spherical quartz powder with a content of 99.90%, a median particle size of 5.3 μm, a spheroidization rate of 97%, and an amorphous rate of 98%.

Embodiment 3

[0040] SiO 2Angular quartz powder with a content of 99.88% and a median particle size of 20 μm is used as raw material, LPG is used as fuel gas, oxygen is used as supporting gas, and oxygen is used as carrier gas for powder delivery. After adjusting the pressure and flow rate of oxygen and LPG, ignite and preheat the spheroidizing furnace for 50 minutes , The powder feeding rate is 100g / min. Analyze by the method identical with embodiment 1, obtain SiO 2 Spherical quartz powder with a content of 99.84%, a median particle size of 11 μm, a spheroidization rate of 94%, and an amorphous rate of 100% (the SEM image of which is shown in figure 2 shown).

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Abstract

The invention discloses high-purity ultrafine spherical quartz powder, a preparation method and special equipment thereof. In the quartz powder, the content of SiO2 is not lower than 99.80 percent, granularity is between 1 and 40 mu meters, sphericization ratio is between 90 and 100 percent, and non-crystalline ratio is between 99 and 100 percent. The preparation method is to axially introduce a quartz raw material into flame at a temperature not lower than 1750 DEG C from a flame burner, melt the quartz raw material in a sphericizing furnace, and classify and collect the quartz powder after cooling to obtain a product. The equipment comprises a powder feeder, the flame burner connected with the powder feeder, a sphericizing furnace in axial connection with the flame burner, a water cooling device encircling the periphery of the lower part of the sphericizing furnace, a gravitational settler connected with the bottom of the sphericizing furnace, a cyclone collector communicated with the upper part of the sphericizing furnace, a cloth collector connected with the top part of the cyclone collector, an exhaust fan connected with the cloth collector, and a water tank connected with theexhaust fan. The quartz powder has high purity, high sphericization ratio, high non-crystalline ratio, simple equipment and process and low cost.

Description

technical field [0001] The invention relates to a high-purity ultrafine spherical quartz powder, its preparation method and special equipment. Background technique [0002] Spherical quartz powder is widely used in the packaging of semiconductor integrated circuits. With the development of large-scale and ultra-large-scale integrated circuits, the requirements for packaging fillers are getting higher and higher. Not only are the fillers required to be high-purity, ultra-fine, and low in radioactive elements, especially The requirement of spheroidization is put forward for the particle shape. Compared with ordinary quartz powder, spherical quartz powder has superior properties such as low expansion, low stress, high bulk density, high fluidity, low friction coefficient, and high filling degree, and has become an indispensable filling material in semiconductor integrated circuit packaging materials. Experts predict that by 2010, the world's demand for spherical quartz powder...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/113
Inventor 靳洪允侯书恩许亮
Owner CHINA UNIV OF GEOSCIENCES (WUHAN)
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