Czochralski silicon single crystal doped with gallium and germanium
A Czochralski silicon and single crystal technology, applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of increased silicon wafer breakage rate, easy damage, broken, low mechanical strength, etc., to improve mechanical strength, The effect of preventing dislocation slip and avoiding light attenuation
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Embodiment 1
[0016] 50kg of polysilicon was put into a quartz crucible, and 0.078g of germanium and 0.3g of gallium were added at the same time. Under the protection of argon, polysilicon was melted at 1410°C, so that germanium and gallium were melted into the polysilicon solution at the same time, and the crystal growth parameters were adjusted as usual to grow Czochralski silicon single crystal at a growth rate of 1.2mm / min. Among them, the gallium concentration is 1×10 15 / cm 3 , the germanium concentration is 1×10 16 / cm 3 .
Embodiment 2
[0018] 50kg of polysilicon was put into a quartz crucible, and 0.78g of germanium and 3g of gallium were added at the same time. Under the protection of argon, polysilicon was melted at 1410°C, so that germanium and gallium were melted into the polysilicon solution at the same time, and the crystal growth parameters were adjusted as usual to grow Czochralski silicon single crystal at a growth rate of 1.2mm / min. Among them, the gallium concentration is 1×10 16 / cm 3 , the germanium concentration is 1×10 17 / cm 3 .
Embodiment 3
[0020] 50kg of polysilicon was put into a quartz crucible, and 7.8g of germanium and 3g of gallium were added at the same time. Under the protection of argon, polysilicon was melted at 1410°C, so that germanium and gallium were melted into the polysilicon solution at the same time, and the crystal growth parameters were adjusted as usual to grow Czochralski silicon single crystal at a growth rate of 1.2mm / min. Among them, the gallium concentration is 1×10 16 / cm 3 , the germanium concentration is 1×10 18 / cm 3 .
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