Method for manufacturing film solar cell

A technology for solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the non-uniform band gap of amorphous silicon germanium thin film, non-uniform light absorption characteristics, hinder the quality of thin film solar cells, etc. problems, to achieve the effect of improving stability and optoelectronic properties, improving absorption efficiency, and reducing production efficiency

Inactive Publication Date: 2010-01-13
GS SOLAR FU JIAN COMPANY +1
View PDF0 Cites 8 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the rapid decomposition of germane, the consumption of germane is greater than that of silane. With the gas flow, germane is consumed too quickly relative to silane, so that the content of germanium in the film deposited on the surface of the substrate in other areas far from the gas inlet and the film The layer thickness is lower than that of the film deposited on the surface of the substrate near the air inlet, resulting in the conte

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for manufacturing film solar cell
  • Method for manufacturing film solar cell

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many ways other than those described here, and those skilled in the art can make similar extensions without departing from the connotation of the present invention. Accordingly, the invention is not limited to the specific implementations disclosed below.

[0026] Amorphous silicon thin-film solar cells can use glass, stainless steel, special plastics or ceramics as substrates. Amorphous silicon thin-film solar cells with glass substrates, light is incident from the glass surface, and the current of the cell is drawn from the transparent conducti...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a method for manufacturing a film solar cell, which comprises the following steps: providing a deposition reaction chamber; putting a substrate on the surface of an electrode plate in the reaction chamber; introducing reaction gases comprising germanium tetrafluoride, silicane and hydrogen into the reaction chamber; and using radio-frequency glow discharge to excite the reaction gases into plasma to deposite a amorphous silicon-germanium film. The method for manufacturing the film solar cell can remarkably improve evenness of band gap and thickness of amorphous silicon-germanium films deposited on the large-area substrate in batch in a large-sized PECVD deposition device.

Description

technical field [0001] The invention relates to the technical field of photovoltaic solar cells, in particular to a method for manufacturing thin-film solar cells. Background technique [0002] With the increasing shortage of energy, the development and utilization of renewable green energy has attracted more and more attention, especially the utilization of solar energy has been favored by the world. Photovoltaic devices as solar energy conversion media, especially the hydrogenated amorphous silicon (a-Si:H) thin-film photovoltaic devices that have appeared in recent years, have the advantages of large area, low cost, can be produced on thin and light substrates, and are easy to lay and install. Represents the development trend of photovoltaic technology. [0003] Thin-film photovoltaic devices, also known as thin-film solar cells or thin-film photovoltaic cells, are used to convert light energy emitted by light sources such as sunlight, lamps or fluorescent lights into el...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): H01L31/20C23C16/30
CPCY02P70/50
Inventor 李沅民林朝晖杨与胜
Owner GS SOLAR FU JIAN COMPANY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap