Bidirectional out-of-plane moving electro-thermal microactuator

Abstract

A bidirectional out-of-plane moving electro-thermal microactuator in the technical field of a micro electro mechanical system comprises a base seat, a supporting block, a downward resistance wire layer, a polymer driving layer and an upward resistance wire layer, wherein the supporting layer and the downward resistance wire layer are positioned on the base seat, a resistance part of the downward resistance wire layer is stretched out and suspended in the air, the polymer driving layer is positioned on the supporting block and the downward resistance wire layer; one end of the polymer driving layer is fixedly connected with the supporting block and the other end is stretched out and suspended in the air; the upward resistance wire layer is deposited on the polymer driving layer; a suspension girder of the polymer driving layer is positioned between the overhanging part of the upward resistance wire layer and the overhanging part of the downward resistance wire layer and tightly connected to form a sandwich structure of a three-layer-film. The invention utilizes the three-layer-film electro-thermal microactuator for supplying the bidirectional driving displacement, carries out offsetting and resetting by two offset layers, gives full play to the advantages of the polymer base electro-thermal microactuator which are big driving displacement, low power dissipation and simple structure, widens the application of the electro-thermal microactuator in the technical field of the micro electro mechanical system.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electro-mechanical systems, in particular to a bidirectional out-of-plane motion electrothermal micro-driver. Background technique [0002] A notable feature of MEMS technology that is different from traditional integrated circuit technology is its mobility, and micro-drivers are at the core of MEMS technology. According to the motion form of the driver, it can generally be divided into in-plane driving and out-of-plane driving, in which the out-of-plane driving can obtain the driving displacement perpendicular to the surface of the device. Due to this characteristic, micro-actuators with out-of-plane motion have been applied in many fields, such as optical micromirrors, optical switches, and micro-relays. The driving forms of micro-actuators mainly include electrostatic, piezoelectric, electromagnetic and electrothermal, etc. Among them, electrothermal driving has a high driving force,...

AI Technical Summary

Problems solved by technology

Due to the design of the micro-bridge to maintain pre-bending through process control stress, the disadvantages of the micro-bridge are also obvious

The stress of the deposited film is often not precisely adjustable, making it difficult to control the pre-bending displacement, so there are high requirements on the process conditions, and the yield can be guaranteed

At the same time, due to the bending of the beam by using the spring stiffness and the thermal stress of the bracket, the driving force is obviously very small, and the bending beam is prone to fatigue damage, resulting in limited life, and the steady-state switching time is too long, reaching the millisecond level, and the operating frequency is very low

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