Liquid metal microfluid machinery inertial conductive switch

Abstract

The invention discloses a liquid metal microfluid machinery inertial conductive switch, comprising a sensitive unit permanent-magnet micromachined inertial switch and an actuating unit liquid metal microfluid static switch, wherein the liquid metal microfluid machinery inertial switch is manufactured by adopting a micro-process technology, the accuracy and the threshold value are adjusted by adopting laser post-technology trimming, and a micro channel architecture is encapsulated by adopting a method of epoxy bonding or local heat bonding. The switch of the invention has the characteristics of small volume, simple structure, low contact resistance, effectively controlled switch threshold value and accuracy, large current permitted to pass by the switch and high reliability. The micro-process technology can carry out mass production and reduce the cost of devices.

Description

technical field [0001] The invention relates to a micro-inertia conductive switch, in particular to a high-precision liquid metal microfluidic mechanical inertia switch integrating a permanent magnet micromechanical switch and a liquid metal microfluidic switch. Background technique [0002] Micro inertia switch is a special acceleration sensor. It saves the signal processing time of ordinary accelerometers, and directly controls the on-off of the switch. Its output results do not require analog-to-digital conversion, and directly generate digital output, which is easy to integrate with digital circuits to form an inertial acceleration threshold measurement unit, which can be directly used for acceleration measurement, and has important applications in the fields of industry and national defense. Inertial drive has passive characteristics and can be used in special occasions. It usually adopts a "spring-mass block" structure, and uses the balance relationship between inert...

AI Technical Summary

Problems solved by technology

But the disadvantage is that the existing micromechanical switch integrates sensing and actuation. When moving liquid metal is used as the switch contact, the microfluid in the microchannel is affected by the coupling characteristics of multiple physical fields, and its flow under the action of acceleration The characteristics are related to viscous force, inertial force, surface tension, etc. At the same time, it is difficult to accurately control the size of liquid metal in the manufacturing process and the thermal expansion coefficient is large, which leads to the threshold value and accuracy of the switch with wetted metal contacts when inertial driving. control

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