Method for preparing material with highly gradient surface micronano structure

Abstract

The invention discloses a method for preparing a material with a highly gradient surface micronano structure. The method comprises the following steps of: 1) coating an electron beam resist on a substrate to obtain an electron beam resist layer, and baking the electron beam resist layer ; 2) exposing, developing and fixing electron beams; 3) coating anisole to obtain an anisole layer, and baking the anisole layer; 4) depositing a target material on the anisole layer to obtain a target material layer; 5) attaching the target material layer to another substrate; and 6) separating the target material layer from the electron beam resist layer. The method has the advantages of simple and convenient operation mode, wide material application range, customized shape and position of a pattern, smooth structural surface and high controllability and repeatability, and can play an important role in fields of surface plasmon research, self assembly of nano particles, utilization of solar energy, micro-flow research and the like.

Description

technical field The invention relates to the field of nanomaterial processing, and relates to a method for preparing a material with a micro-nano structure, in particular to a method for preparing a material with a surface micro-nano structure. Background technique The structure of surface micro- and nanostructures is of great significance in many fields, and has played a huge role in surface plasmons, self-assembly of nanoparticles, solar energy utilization, and microfluidic devices (H. Ditlbacher, J.R. Krenn, G. Schider et al. Applied Physics Letters, 81, 1762 (2002); M.J. Lee, J. Kim and Y.S. Nanotechnology, 19, 355301 (2008); A. Lasagni, M. Nejati, R. Clasen et al. Advanced Functional Materials, 8, 580 (2006); S. Billat, K. Kliche, R. Gronmaier et al. Sensors and Actuators A: Physical, 145-146, 66 (2008)). Along with the trend of device miniaturization, various micro-nano-fabrication methods have been greatly developed, so as to obtain simple and precise control of the ...

AI Technical Summary

Problems solved by technology

However, these methods are difficult to construct an ideal structure with a high degree of gradient and a smooth surface.

Images